2008
DOI: 10.1063/1.2981576
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Hydrothermally fabricated epitaxial PbTiO3 patterns patterned lithographically by etching in hydrothermal KOH solution

Abstract: We investigated the chemical etching behavior of heteroepitaxial PbTiO3 films on Nb-doped SrTiO3 substrate with mono-+c-domain fabricated by using hydrothermal epitaxy. The as-fabricated films were patterned lithographically into submicron-sized patterns with various lateral sizes using KOH solution and the etching mechanism is suggested. Our study reveals the feasibility of fabricating patterned nanodomains in PbTiO3 films by scanning probe microscopy domain engineering and a chemical etching process. Further… Show more

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Cited by 3 publications
(2 citation statements)
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“…Correspondingly, the fabrication approach should meet the following basic requirements: i) the method itself needs to be cheap and easily accessible, allowing for an easy control of the size and shape in the sub‐one‐hundred nanometer region as well as mass production of desired structures with a narrow size distribution and ii) the approach is required to be high‐temperature compatible. To date, various approaches have been employed for the fabrication of structurally well‐defined ferroelectric nanostructures 26–60. The fabrication strategies so far can be classified into two broad groups: top‐down and bottom‐up approaches.…”
Section: Fabrication Of Ferroelectric Nanostructuresmentioning
confidence: 99%
“…Correspondingly, the fabrication approach should meet the following basic requirements: i) the method itself needs to be cheap and easily accessible, allowing for an easy control of the size and shape in the sub‐one‐hundred nanometer region as well as mass production of desired structures with a narrow size distribution and ii) the approach is required to be high‐temperature compatible. To date, various approaches have been employed for the fabrication of structurally well‐defined ferroelectric nanostructures 26–60. The fabrication strategies so far can be classified into two broad groups: top‐down and bottom‐up approaches.…”
Section: Fabrication Of Ferroelectric Nanostructuresmentioning
confidence: 99%
“…Various experimental approaches to obtain nanostructured ferroelectrics with small size, good ordering, and high quality have been recently developed, including so called top-down [33][34][35][36][37] and bottom-up methods [38][39][40][41][42]. Top-down methods, for example, e-beam direct writing (EBDW), e-beam patterning, focused ion-beam (FIB) milling, and nano imprint lithography are useful approaches in view of precise size control and ordering of nanofeatures.…”
Section: Introductionmentioning
confidence: 99%