<i>XY</i> stage driven by ultrasonic linear motors for the electron-beam x-ray mask writer EB-X3

Kunioka, Tatsuya; Takeda, Yuji; Matsuda, Takeshi; Shimazu, Nobuo; Nakayama, Yoshinori

doi:10.1116/1.591096

Cited by 25 publications

(13 citation statements)

References 1 publication

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“…Precision planar positioning stages are one of the important key components for measurement apparatuses and machining tools, so those positioning stages have been widely used in various fields such as precision machining, semiconductor manufacturing and precision measurement [1,2]. With regard to the ultra-precision positioning stages that have sub-micrometric positioning accuracy and nanometric displacement resolution, an air-bearing slide is generally employed to realize the smooth motion without the friction of the sliding part [3,4].…”

Section: Introductionmentioning

confidence: 99%

Three-axis vibration measurement by using a grating-interferometric vibrometer

Ito¹,

Aihara²,

Kim³

et al. 2014

Advanced Optical Technologies

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Three-axis vibration measurement of the linear air-bearing stage demonstrated by utilizing the method of the multi-axis laser interferometer is discussed. In order to detect the X-Y-Z directional vibration of the positioning stage table simultaneously, two-dimensional XY gratings are utilized as the scale grating and the reference grating of the interferometer. The X-and Y-directional positive and negative first-order diffracted beams are superimposed to generate the interference signals on the photodetectors. When the multi-axis vibration is applied to the scale grating, the intensities of the interference signals in X-and Y-directions varied corresponding to the vibration of the scale grating. Consequently, three-axis vibrations of the scale grating can be calculated by processing the X-and Y-directional positive and negative first-order interference signals. In this paper, a three-axis vibrometer based on the grating-interferometer has been developed for measurement of the positioning stage table vibration. The detection method of the vibration based on the Doppler frequency shift has been demonstrated. As an application of the multi-axis grating-interferometric vibrometer, multi-axis vibrations of the linear air-bearing stage are measured by using the developed vibrometer.

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Section: Introductionmentioning

confidence: 99%

Three-axis vibration measurement by using a grating-interferometric vibrometer

Ito¹,

Aihara²,

Kim³

et al. 2014

Advanced Optical Technologies

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show abstract

“…Precision planar motion (XY and/or XYθ Z ) stages are widely used in semiconductor manufacturing systems, precision machine tools, and scanning probe measurement systems [1][2][3][4]. These stages are required to have sub-micron to nanometer positioning resolution and/or accuracy as well as characteristics such as high speed, long travel range, and compact size.…”

Section: Introductionmentioning

confidence: 99%

A surface motor-driven planar motion stage integrated with an XYθ surface encoder for precision positioning

Gao

Dejima

Yanai

et al. 2004

Precision Engineering

125

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“…Lately, compact linear motors are in great demand in the semiconductor industry and planetary exploration where no electromagnetic interference, quick response, self-locking and accurate positioning are basic requirements for actuators [11][12][13]. These requirements are hard to meet for traditional electromagnetic motors, but easy for USMs because of their inherent merits.…”

Section: Introductionmentioning

confidence: 99%

Ultrasonic linear motor using the L-B mode Langevin transducer with an exponential horn

Shi

Chen

Liu

et al. 2008

Front. Mech. Eng. China

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An ultrasonic linear motor is proposed and fabricated by using the longitudinal and bending vibration double mode bolt-clamped Langevin type transducer to meet high power and speed requirements in the aerospace and semiconductor industries. The elliptical trajectory of the driving tip is formed by exciting the longitudinal and bending vibration with phase difference, which generates thrust force and normal force, respectively. An exponential shape horn is adopted to achieve a high linear speed. The classical theory of the transducer horn is used to determine the transducer's longitudinal resonance frequency and configuration dimensions. FEM analysis is used to degenerate the longitudinal and bending vibration resonant frequencies. The different locations of the driving tip on the horn cause different elliptical-shaped vibration trajectories, and how the trajectory's shape variation influences motor mechanical output is studied by using the FEM method. Simulation analysis and experiment results show that the motor has better performance when the driving tip is located at the antinode of the bending wave. Typical output of the prototype is no-load velocity of 480 mm/s and maximum driving force of 25 N.

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XY stage driven by ultrasonic linear motors for the electron-beam x-ray mask writer EB-X3

Cited by 25 publications

References 1 publication

Three-axis vibration measurement by using a grating-interferometric vibrometer

Three-axis vibration measurement by using a grating-interferometric vibrometer

A surface motor-driven planar motion stage integrated with an XYθ surface encoder for precision positioning

Ultrasonic linear motor using the L-B mode Langevin transducer with an exponential horn

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