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            -axis differential silicon-on-insulator resonant accelerometer with high sensitivity

Shang, Yanlong; Wang, Junbo; Tu, Sheng; Liu, Lei; Chen, Deyong

doi:10.1049/mnl.2011.0129

Cited by 9 publications

(5 citation statements)

References 7 publications

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“…An example of this are vibrating ring gyroscopes. These type of devices are based on higher order extensional modes in highly symmetric shell structures [152] or in ring structures [153][154][155][156] like the device in figure 27. Due to their symmetry degenerate modes can be found in such structures which have the same eigenfrequency but the mode shapes are rotated with respect to each other.…”

Section: Inertial Sensorsmentioning

confidence: 99%

Vibrational modes in MEMS resonators

Platz

Schmid

2019

J. Micromech. Microeng.

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Advances in microfabrication technology have enabled micromechanical systems (MEMS) to become a core component in a manifold of applications. For many of these applications the vibrational eigenmodes of a MEMS resonator play a crucial role. However, despite this widespread use of the notion of vibrational modes, the general properties of vibrational modes are not well known. In this review, we aim to provide a general overview of various aspects of vibrational modes in MEMS resonators.Vibrational eigenmodes are a type of solution to deformation problems in linear elasticity which give rise to a spatial and a temporal eigenvalue problem coupled by a common eigenvalue. The spatial eigenvalue problem determines a mode shape while the temporal eigenvalue problem defines an eigenfrequency at which the structure vibrates. To reduce the modelling complexity, we introduce different simplified elastic models for different eigenmodes like flexural modes in beams and strings in one dimension or plates and membranes in two dimensions. Even though very different eigenmode solutions can be found in MEMS resonators, the dynamics of vibrational modes are governed by generic laws. In the linear regime these laws connect vibrational eigenmodes to the phenomenon of resonance. In the nonlinear regime also other phenomena like bifurcations, multi-stability or parametric amplification are observed.Besides general properties of vibrational eigenmodes, we discuss how different aspect of vibrational modes are utilized in different applications. MEMS timing devices can be optimized by exploring the damping in different eigenmodes and resonant amplification is utilized in the measurement of acceleration, mass or fluid properties. While measurements with MEMS resonators are often performed in the linear regime, the modal dynamics in atomic force microscopy are inherently nonlinear. Beyond classical mechanics, we discuss how vibrational modes in MEMS resonators recently entered the quantum world.

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Section: Inertial Sensorsmentioning

confidence: 99%

Vibrational modes in MEMS resonators

Platz

Schmid

2019

J. Micromech. Microeng.

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“…Nevertheless, the sensing movement is still coupled with the oscillation of torsional resonators. In addition, resonant accelerometers based on the electromagnetic excitation have a poor process compatibility and bulky volume [ 13 ]. A vertical resonant accelerometer based on a nanoelectromechanical oscillator is beneficially attempted in the literature [ 14 ].…”

Section: Introductionmentioning

confidence: 99%

A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness

Yang

Wang

Dai

et al. 2015

Sensors

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Presented in the paper is the design, the simulation, the fabrication and the experiment of a new z-axis resonant accelerometer based on the electrostatic stiffness. The new z-axis resonant micro-accelerometer, which consists of a torsional accelerometer and two plane resonators, decouples the sensing movement of the accelerometer from the oscillation of the plane resonators by electrostatic stiffness, which will improve the performance. The new structure and the sensitive theory of the acceleration are illuminated, and the equation of the scale factor is deduced under ideal conditions firstly. The Ansys simulation is implemented to verify the basic principle of the torsional accelerometer and the plane resonator individually. The structure simulation results prove that the effective frequency of the torsional accelerometer and the plane resonator are 0.66 kHz and 13.3 kHz, respectively. Then, the new structure is fabricated by the standard three-mask deep dry silicon on glass (DDSOG) process and encapsulated by parallel seam welding. Finally, the detecting and control circuits are designed to achieve the closed-loop self-oscillation, to trace the natural frequency of resonator and to measure the system frequency. Experimental results show that the new z-axis resonant accelerometer has a scale factor of 31.65 Hz/g, a bias stability of 727 μg and a dynamic range of over 10 g, which proves that the new z-axis resonant micro-accelerometer is practicable.

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“…For out-of-plane resonant accelerometer, the first design was presented in 1995, which was fabricated with double-diffusion electrochemical etch stop process, leading to the sensitive structure suffers from the residual stress [3] . To address this issue ， new structures fabricated by silicon-on-insulator MEMS technology were reported by Chinese Academy of Sciences in 2011 and 2012, both shows vary high differential sensitivity [4] [5] . And at the same time, as a result of the asymmetry of the designed sensitive structure, the experiments indicate at least 8% disparity of sensitivity between the two resonant beams, which may affect device performance.…”

Section: Introductionmentioning

confidence: 99%

A Novel Micro-Machined Out-of-Plane Resonant Accelerometer with Differential Structure of Different-Height Resonant Beams

Zhao

Liu

Dong

2015

KEM

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A novel micro-machined out-of-plane resonant accelerometer with a differential structure is presented. The micro-machined accelerometer consists of two identical torsional structures with asymmetric mass distribution, torsion beam and two different-height resonant beams. Due to the asymmetric mass distribution, the two mirror-symmetrical-placed torsional structures turn an angle under an out-of-plane acceleration, which makes the different-height resonant beam connected to the structures bear different axial stresses, outputting a differential resonant frequency shift. A multi-layer mask etching process based on silicon-on-glass micro-machined technology was employed to fabricate the differential structure and the different-height resonant beams. Primary experiment shows the differential sensitivity of out-of-plane acceleration is 32Hz/g at the resonant frequency of 21.41 kHz.

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Z -axis differential silicon-on-insulator resonant accelerometer with high sensitivity

Cited by 9 publications

References 7 publications

Vibrational modes in MEMS resonators

Vibrational modes in MEMS resonators

A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness

A Novel Micro-Machined Out-of-Plane Resonant Accelerometer with Differential Structure of Different-Height Resonant Beams

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