Image inverting, topography and feature size manipulation using organic/inorganic bi-layer lift-off for nanoimprint template

Si, Shuhao; Hoffmann, Martin

doi:10.1016/j.mee.2018.05.005

Cited by 4 publications

(3 citation statements)

References 16 publications

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“…Such pattern generation is cost‐effective, fast and scalable; when done on a bilayer, it also allows lift‐off. [ 33 ] Here, we stamp the master on the bilayer consisting of poly(methyl methacrylate) (PMMA) sacrificial layer and STU‐7 NIL resist ( Figure a). The thickness of both layers needs to be optimized so that both residual layers are minimal to prevent a prolonged oxygen breakthrough, which would otherwise lead to a significant change in duty cycle (Figure S2, Supporting Information).…”

Section: Resultsmentioning

confidence: 99%

“…The latter allows for a convenient tuning of the grating width and, in turn, of the duty cycle as we recently reported[32] -the higher the H 2 flux, the larger the duty cycle (FigureS1, Supporting Information).We then use NIL to replicate the master and prepare a series of patterns for the subsequent etching (Figure1, step 2). Such pattern generation is cost-effective, fast and scalable; when done on a bilayer, it also allows lift-off [33]. Here, we stamp the master…”

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confidence: 99%

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Fabrication of High‐Aspect Ratio Nanogratings for Phase‐Based X‐Ray Imaging

Michalska

Kokot

Macdonald

et al. 2023

Adv Funct Materials

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Diffractive optical elements such as periodic gratings are fundamental devices in X-ray imaging -a technique that medical, material science, and security scans rely upon. Fabrication of such structures with high aspect ratios at the nanoscale creates opportunities to further advance such applications, especially in terms of relaxing X-ray source coherence requirements. This is because typical grating-based X-ray phase imaging techniques (e.g., Talbot self-imaging) require a coherence length of at least one grating period and ideally longer. In this paper, the fabrication challenges in achieving high-aspect ratio nanogratings filled with gold are addressed by a combination of laser interference and nanoimprint lithography, physical vapor deposition, metal assisted chemical etching (MACE), and electroplating. This relatively simple and cost-efficient approach is unlocked by an innovative post-MACE drying step with hexamethyldisilazane, which effectively minimizes the stiction of the nanostructures. The theoretical limits of the approach are discussed and, experimentally, X-ray nanogratings with aspect ratios >40 are demonstrated. Finally, their excellent diffractive abilities are shown when exposed to a hard (12.2 keV) monochromatic X-ray beam at a synchrotron facility, and thus potential applicability in phase-based X-ray imaging.

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Section: Resultsmentioning

confidence: 99%

mentioning

confidence: 99%

Fabrication of High‐Aspect Ratio Nanogratings for Phase‐Based X‐Ray Imaging

Michalska

Kokot

Macdonald

et al. 2023

Adv Funct Materials

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show abstract

“…This process enables single-step, large-area patterning of multicomponent structures with reduced alignment requirements and no diffraction/diffusion limits associated with the photolithography and shadow mask deposition. Contact printing is also compatible with flexible and nonplanar substrates in addition to organic semiconductors and inorganic light-emitting materials that cannot be structured using traditional photolithography. − However, the examples of transfer printing of heterogeneous multilayer microfeatures are rare and often limited to sequential layer-by-layer thin-film assembly due to the problems associated with the integration of dissimilar materials. − …”

Section: Introductionmentioning

confidence: 99%

Contact Printing of Multilayered Thin Films with Shape Memory Polymers

2022

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This study describes a method for transfer printing microarrays of multilayered organic–inorganic thin films using shape memory printing stamps and microstructured donor substrates. By applying the films on the microstructured donor substrates during physical vapor deposition and modulating the interfacial adhesion using a shape memory elastomer during printing, this method achieves (1) high lateral and feature-edge resolution and (2) high transfer efficiency from the donor to the receiver substrate. For demonstration, polyurethane-acrylate stamps and silicon/silicon oxide donor substrates were used in the large-area transfer printing of organic–inorganic thin-film stacks with micrometer lateral dimensions and sub-200 nm thickness.

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Using sugar as a mask material (SAAMM) in micro-nano fabrication: a high-performance, green and simple method

Zhang¹,

Guo²,

Yang³

et al. 2021

J. Micromech. Microeng.

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Sugar is a natural food and a common organic compound that widely exists in nature. Sugar features easy patterning, solubility in water, environmental friendliness, low cost, and easy combination with micro-nano process. In this study, sugar is proposed to be used as a micro-nano mask material in micro-nano fabrication. Results show that sugar can be easily used to fabricate various kinds of micro-nano mask patterns on different wettability substrates. The fabrication method based on sugar mask has many advantages; it is diverse, simple, pollution-free, and inexpensive. Besides, sugar is strongly compatible with micro-nano fabrication technology, because it can maintain good peeling properties, good viscosity, and good stability in subsequent micro-nano fabrication and achieve the high-quality transfer of mask patterns. In addition, graphite super-lubricity micro-nano movable devices are made through the proposed sugar mask method, which also has good and reliable performance compared with e-beam lithography. Compared with micro-nano fabrication based on photoresist masks, micro-nano fabrication based on the sugar mask is simpler and cheaper. In the micro-nano processing of the sugar mask, the lift-off and removal of residual sugar can be easily completed using water. In summary, we believe that sugar as a mask material is effective and can be widely used in micro-nano manufacturing.

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Image inverting, topography and feature size manipulation using organic/inorganic bi-layer lift-off for nanoimprint template

Cited by 4 publications

References 16 publications

Fabrication of High‐Aspect Ratio Nanogratings for Phase‐Based X‐Ray Imaging

Fabrication of High‐Aspect Ratio Nanogratings for Phase‐Based X‐Ray Imaging

Contact Printing of Multilayered Thin Films with Shape Memory Polymers

Using sugar as a mask material (SAAMM) in micro-nano fabrication: a high-performance, green and simple method

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