“…However the caused problems in increasing the accelerating voltage are not only a great increase in manufacturing and maintenance costs but also the serious radiation damage to the specimen. On the other hand, an alternative effective approach for the improvement of the point resolution is to reduce the spherical aberration coefficient (C s ) by hardware aberration correction, so-called C s -corrector (Haider et al, 1995) or by software method including electron crystallographic image processing (Li and Fan, 1979;Fan et al, 1985;Han et al, 1986;Hu and Li, 1991;Zou et al, 1996;Li, 2010;De Caro et al, 2010;Wan et al, 2012) and exit wave reconstruction Coene et al, 1996;Zandbergen and VanDyck, 2000;Chen et al, 2004;Allen et al, 2004;Hsieh et al, 2004). With a C scorrector, the point resolution can be extended to sub-angstrom level such that light atoms can be relatively easily detected by the negative C s imaging technique (Jia et al, 2003;Urban, 2008).…”