2001
DOI: 10.1002/1439-2054(200108)286:8<488::aid-mame488>3.0.co;2-f
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Imagewise Structuring of Diazosulfonate Polymer Films by UV Light and Laser Irradiation - A Comparison

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Cited by 7 publications
(4 citation statements)
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“…Lithographic methods can be applied to organic films when photosensitive groups are available. More recently, due to the possibility to use IR‐lasers in combination with IR absorbers for imaging, also thermal processes are used to create imagewise chemical changes in organic layers as we have shown for diazosulfonate polymer films 14. Since several years photo and thermolabile protecting groups for special functionalities, e.g., COOH or amino groups, are known and used mainly in peptide synthesis 15,16.…”
Section: Introductionmentioning
confidence: 99%
“…Lithographic methods can be applied to organic films when photosensitive groups are available. More recently, due to the possibility to use IR‐lasers in combination with IR absorbers for imaging, also thermal processes are used to create imagewise chemical changes in organic layers as we have shown for diazosulfonate polymer films 14. Since several years photo and thermolabile protecting groups for special functionalities, e.g., COOH or amino groups, are known and used mainly in peptide synthesis 15,16.…”
Section: Introductionmentioning
confidence: 99%
“…However, given the results for diazosulfonate copolymers without any TMSPMA content prepared under similar conditions, [26,28] we expect M n 0 s of about 10 000 to 15 000 g Á mol À1 .…”
Section: Resultsmentioning
confidence: 99%
“…This is explainable by the loss of the hydrophilic diazosulfonate group in the decomposition process. In comparison to earlier studies on the wettability of spin-coated and irradiated diazosulfonate copolymers we have measured considerably higher contact angles, [28] even though the MMA content was similar. In these previous studies copolymers of MMA and methacrylamido-4-phenyldiazosulfonate (80:20) have been prepared also via spin-coating in about 50-nm thickness and from methanol solution.…”
Section: Film Preparationmentioning
confidence: 99%
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