PurposeThe goal of this study is to assess the utility of Cherenkov imaging (CI) and scintillation imaging (SI) as high‐resolution techniques to measure CyberKnife® beam shape quantitatively at the irradiation surface in quality assurance (QA).MethodsThe EMCCD camera captured scintillation and Cherenkov photons arising from 6 MV x‐ray dose deposition produced by the CyberKnife® VSI System. Two imaging methods were done at source to surface distance of 800 cm with the same field size, ranging from 10 to 60 mm using fixed cones and iris collimators. The output sensitivity and constancy were measured using the SI and CI, and benchmarked against an ionization chamber. Line profiles of each beam measured by optical imaging were compared with film measurement. Position shifts were introduced to test the sensitivity of SI and CI to small beam position deviations. To assess reproducibility, the beam measurements were tested three times on 5 consecutive days.ResultsBoth systems exhibited comparable sensitivity to the ionization chamber in response to fluctuations in CyberKnife® output. The beam profiles in SI matched well with the measured film image, with accuracy in the range of ± 0.20 and ± 0.26 mm standard deviation for the circle and iris field, respectively. The corresponding accuracy measured by CI is in the range of ± 0.25 and ± 0.33 mm, respectively. These are all within the tolerance recommended by the guidelines of CyberKnife® QA. The accuracy measured by SI and CI for 1 mm beam position shift within 0.21 and 0.45 mm tolerance, respectively. Repeatability measurements of the beam have shown a standard deviation within 0.94 mm.ConclusionsSI and CI techniques are tested to provide a valid way to measure CyberKnife® beam shape in this study. Meanwhile, the systematic comparison of SI and CI also provides evidence for the measurement methods selection appropriately.