Impact of airborne molecular contamination to nano-device performance

Yeh, Ching-Fa; Hsiao, Chih-Wen; Lin, Shiuan-Jeng; Xie, Zhimin; Kusumi, Toshio

doi:10.1109/nano.2002.1032289

Cited by 2 publications

(4 citation statements)

References 2 publications

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“…[1][2][3][4][5][6][7] The concentration of AMC in a microelectronic clean room is as low as 1/100 of that in resident buildings; however, this concentration can cause serious harm on production in microelectronic clean rooms. [8][9][10] MCs are a special kind of multi-component contaminants, and there are a large number of MC pollution sources in microelectronic clean rooms, such as paints, plasticizers, and flame retardants, which can emit benzene, phthalate, and other MC pollutants. [11][12][13][14][15] These contaminants can affect the accuracy of the production process and cause erosion on the chip.…”

Section: Introductionmentioning

confidence: 99%

“…Airborne molecular contaminants (AMCs) are the main influencing factors of production yield in microelectronic clean rooms, including MA (Acid), MB (Base), MC (Congelation), and MD(Dopant) 1‐7 . The concentration of AMC in a microelectronic clean room is as low as 1/100 of that in resident buildings; however, this concentration can cause serious harm on production in microelectronic clean rooms 8‐10 . MCs are a special kind of multi‐component contaminants, and there are a large number of MC pollution sources in microelectronic clean rooms, such as paints, plasticizers, and flame retardants, which can emit benzene, phthalate, and other MC pollutants 11‐15 .…”

Section: Introductionmentioning

confidence: 99%

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Long‐term performance analysis of chemical filters in clean rooms based on a prediction model

Zhi

Liu

2020

Indoor Air

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Chemical filters are the most important devices for removing gas-phase pollutants in clean rooms. However, the testing concentration of chemical filters is too high for reflecting their performance in a real clean room environment. This study tested the adsorption performance of chemical filters in the two most commonly used shapes at different concentrations. Then, the Langmuir equation and Wheeler-Jonas kinetic How to cite this article: Zhi Y, Liu J, Liu K. Long-term performance analysis of chemical filters in clean rooms based on a prediction model.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Long‐term performance analysis of chemical filters in clean rooms based on a prediction model

Zhi

Liu

2020

Indoor Air

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“…[10][11][12][13][14][15][16][17][18] For electrode surfaces, airborne molecular contamination introduces layer(s) of insulating organic matter through physisorption or chemisorption. In principal, the introduced organic contaminants act as energy barriers to the electrical transport through the interface formed with the electrode, and thereby affect the electrical behavior of the electrode and performance of the device.…”

Section: Introductionmentioning

confidence: 99%

“…The adventitious contamination of electronic devices by airborne molecular contaminants has become increasingly serious in the electronics industry with the increased need to fabricate highly integrated circuits. [10][11][12][13][14][15][16][17][18] For electrode surfaces, airborne molecular contamination introduces layer(s) of insulating organic matter through physisorption or chemisorption. In principal, the introduced organic contaminants act as energy barriers to the electrical transport through the interface formed with the electrode, and thereby affect the electrical behavior of the electrode and performance of the device.…”

Section: Introductionmentioning

confidence: 99%

EGaIn Microelectrode for Electrical Characterization of ITO-Based van der Waals Interface and Airborne Molecular Contamination of ITO Surface

Kong¹,

Yoon²

2015

J. Electrochem. Soc.

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This paper describes the electrical characterization of the van der Waals interfaces formed between indium-tin oxide (ITO) and a liquid metal-based microelectrode. We examined the influence of the adventitious contamination of the ITO surface by airborne molecular contaminants on the electrical transport across an ITO-based van der Waals interface. We constructed large-area junctions of the form ITO//Ga 2 O 3 /EGaIn, where EGaIn is a liquid eutectic gallium-indium alloy covered with a self-passivating thin oxide film (Ga 2 O 3 of ∼ 0.7 nm), and "//" denotes the van der Waals interface formed between the ITO and EGaIn electrodes. Comparisons of the current density data for junctions formed with ITO surfaces prepared via five different surface cleaning methods-utilizing UV light, ozone and/or organic solvent (ethanol)-indicated that the electrical conductance of the ITO//Ga 2 O 3 van der Waals interface was significantly enhanced (by three orders of magnitude) by UV/ozone surface cleaning, based on comparisons of the median value of the log-current density, and the dispersion of the data was significantly narrowed. The results reported in this work show that the electrical characterization of surfaces using the EGaIn-based microelectrode is an attractive method for investigating the electrical behavior of a conducting surface and the molecular adsorption phenomena on it.Thin films of indium-tin oxide (ITO) have received significant attention as optically transparent (∼90% transmittance in the visible wavelength range), electrically conducting (∼10 4 S/cm) electrodes in a variety of optoelectronic devices including solar cells, organic lightemitting devices (OLEDs), and liquid-crystal displays (LCDs). 1-5 In fabricating molecular and organic electronics with ITO thin-film electrodes, van der Waals (vdW) interfaces are often formed between the ITO surface and a molecular layer or another electrode. Understanding the electrical characteristics of such vdW interfaces and the influence of adventitious contamination on their properties is an important issue for improving the performance of molecular electronic devices. This information, however, remains elusive due to the experimental difficulties in generating vdW interfaces with high reproducibility and accessibility, and in measuring their electrical conductance in a statistically significant way, without the complexities that arise from a top-electrode such as ill-defined contacts and contact areas, airborne contamination on its surface, and the irreproducibility of its electrical behavior.This paper describes the formation and electrical characterization of junctions of the form ITO//Ga 2 O 3 /EGaIn, where EGaIn is eutectic gallium indium alloy that is covered with a self-passivating oxide film (Ga 2 O 3 of ∼0.7 nm), 6-9 and "//" denotes the vdW interface generated from the contact between the two electrodes. This type of junction allows the convenient generation of ITO-based vdW interfaces, their electrical characterization, and an examination of the relationship b...

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Impact of airborne molecular contamination to nano-device performance

Cited by 2 publications

References 2 publications

Long‐term performance analysis of chemical filters in clean rooms based on a prediction model

Long‐term performance analysis of chemical filters in clean rooms based on a prediction model

EGaIn Microelectrode for Electrical Characterization of ITO-Based van der Waals Interface and Airborne Molecular Contamination of ITO Surface

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