2018 22nd International Conference on Ion Implantation Technology (IIT) 2018
DOI: 10.1109/iit.2018.8807894
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Impact of Carbon on the Deactivation Behaviors of Boron and Phosphorus in Preamorphized Silicon

Ruey-Dar Chang
1
,
Hsueh-Chun Liao
2
,
Jui-Chang Lin
3
et al.
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