The microstructure and ferroelectric properties of Bi 3.25 La 0.75 Ti 3 O 12 films prepared by photochemical metal-organic deposition using photosensitive precursors were characterized. The diffraction intensities showed a distribution similar to Bi 3.25 La 0.75 Ti 3 O 12 ceramics, and Pt (111) was found to not influence the growth orientation of Bi 3.25 La 0.75 Ti 3 O 12 films. The values of measured remnant polarization and dielectric constant of Bi 3.25 La 0.75 Ti 3 O 12 films annealed at 650 and 700 • C were 8.7, 16.0 µC/cm 2 and 172, 276, respectively. The films remained free of fatigue up to 10 9 switching cycles. These results suggest the possible application of ferroelectric Bi 3.25 La 0.75 Ti 3 O 12 film, relatively easily and without high cost process such as dry etching.