Impact of thickness variation on structural, dielectric and piezoelectric properties of (Ba,Ca)(Ti,Zr)O3 epitaxial thin films

Ion, Valentin; Craciun, F.; Scarisoreanu, N.; Moldovan, A.; Andrei, Andreea; Bı̂rjega, R.; Ghica, C.; Pietrantonio, F. Di; Cannatà, D.; Benetti, M.; Dinescu, M.

doi:10.1038/s41598-018-20149-y

Cited by 29 publications

(16 citation statements)

References 32 publications

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“…The relative permittivity increased with increasing thickness of LiTaO 3 films whereas, the dielectric losses were found to decrease, the reason is the mechanical strain and polarization in the piezoceramic films decreases with increasing film thickness (51).…”

Section: Accepted Articlementioning

confidence: 92%

Interdependence of piezoelectric coefficient and film thickness in LiTaO₃ cantilevers

et al. 2021

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Electromechanical energy demands homogenous thick films of piezoceramics with sufficiently large piezoelectric constant and reproducible performance. Single-phase LiTaO 3 films deposited by sol-gel processing have been fabricated as cantilevers to investigate the interdependence of dielectric and piezoelectric properties as a function of film thickness. Phase pure LiTaO 3 films with varying thickness in the range of 2.07-4.37 µm on stainless steel substrates were obtained after calcination of samples at Accepted Article This article is protected by copyright. All rights reserved 650 °C. The relative permittivity of optimized spin-coated films peaked at 479.73 (1 kHz), whereas the piezoelectric coefficient (d 33 mode) determined by piezo force microscopy was in the range of 21-24 pm/V. The effect of poling was studied through the butterfly and phase curves. A figure of merit up to 3.29 (10-18 m 2 /V 2) was determined for cantilever devices, which were able to generate a peak-to-peak voltage of 0.046-0.15 V using a 1 MΩ resistor as an impedance load at a fixed acceleration of 1.5 m/s 2. While the power density was in the range of ~ 4-20x10-9 W/m 3 , increased with the increasing film thickness. The leakage current density decreased in the range of 4x10-5-6x10-7 A/m 2 in the same direction. As both ferroelectric and piezoelectric properties of LiTaO 3 films are dependent on film thickness, an optimal energy conversion efficiency was obtained for a thickness of ~3 µm. Furthermore, these devices were tested up to a temperature of 150 °C for voltage generation. Given the need for lead-free piezoelectric materials for environmental applications, these LiTaO 3 cantilevers are very promising for vibrational energy harvester applications especially due to their cost effectiveness, small size, stability at higher temperatures, and repeatable properties which makes them suitable for MEMS devices for industrial applications.

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Section: Accepted Articlementioning

confidence: 92%

Interdependence of piezoelectric coefficient and film thickness in LiTaO₃ cantilevers

et al. 2021

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“…Equivalent electrical circuit presented in Figure 2 remained valid. It is known for thicker films that the piezoelectric phenomena are localized in the film bulk rather than distributed between the thin film and the substrate surface [31]. The mechanical waves propagate only in the piezoelectric material and the electrical processes are revealed there instead at the film/substrate interface.…”

Section: (B)mentioning

confidence: 99%

Impedance Spectroscopy of Lead-Free Ferroelectric Coatings

Aleksandrova

Пандиев

2021

Coatings

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This paper presents impedance measurements of ferroelectric structures involving lead-free oxide and polymer-oxide composite coatings for sensing and energy harvesting applications. Three different ferroelectric materials grown by conventional microfabrication technologies on solid or flexible substrates are investigated for their basic resonant characteristics. Equivalent electrical circuit models are applied to all cases to explain the electrical behavior of the structures, according to the materials type and thickness. The analytical results show good agreement with the experiments carried out on a basic types of excited thin-film piezoelectric transducers. Additionally, temperature and frequency dependences of the dielectric permittivity and losses are measured for the polymer-oxide composite device in relation with the surface morphology before and after introduction of the polymer to the functional film.

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“…Valentin Ion et al showed nontrivial dependence on film thickness for epitaxial thin films of Ba(Ti 0.8 Zr 0.2 )O 3 -x(Ba 0.7 Ca 0.3 )TiO 3 (x = 0.45) ceramics and showed that the dielectric constant reached the highest value of around about 3400. The dielectric loss was small (nearly 1%) although it started to increase slightly above 100 kHz [94]. Mg-doped BCZT thin films were fabricated by Kalkur et al The capacitors which were post annealed at 700 °C showed enhanced dielectric properties.…”

Section: Bczt Thin Films For Enhancement Of Dielectric Propertiesmentioning

confidence: 99%

Dielectric and Energy Storage Properties of Ba(1−x)CaxZryTi(1−y)O3 (BCZT): A Review

et al. 2019

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The Ba(1−x)CaxZryTi(1−y)O3 (BCZT), a lead-free ceramic material, has attracted the scientific community since 2009 due to its large piezoelectric coefficient and resulting high dielectric permittivity. This perovskite material is a characteristic dielectric material for the pulsed power capacitors industry currently, which in turn leads to devices for effective storage and supply of electric energy. After this remarkable achievement in the area of lead-free piezoelectric ceramics, the researchers are exploring both the bulk as well as thin films of this perovskite material. It is observed that the thin film of this materials have outstandingly high power densities and high energy densities which is suitable for electrochemical supercapacitor applications. From a functional materials point of view this material has also gained attention in multiferroic composite material as the ferroelectric constituent of these composites and has provided extraordinary electric properties. This article presents a review on the relevant scientific advancements that have been made by using the BCZT materials for electric energy storage applications by optimizing its dielectric properties. The article starts with a BCZT introduction and discussion of the need of this material for high energy density capacitors, followed by different synthesis techniques and the effect on dielectric properties of doping different materials in BCZT. The advantages of thin film BCZT material over bulk counterparts are also discussed and its use as one of the constituents of mutiferroic composites is also presented. Finally, it summarizes the future prospects of this material followed by the conclusions.

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Impact of thickness variation on structural, dielectric and piezoelectric properties of (Ba,Ca)(Ti,Zr)O3 epitaxial thin films

Cited by 29 publications

References 32 publications

Interdependence of piezoelectric coefficient and film thickness in LiTaO₃ cantilevers

Interdependence of piezoelectric coefficient and film thickness in LiTaO₃ cantilevers

Impedance Spectroscopy of Lead-Free Ferroelectric Coatings

Dielectric and Energy Storage Properties of Ba(1−x)CaxZryTi(1−y)O3 (BCZT): A Review

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Impact of thickness variation on structural, dielectric and piezoelectric properties of (Ba,Ca)(Ti,Zr)O3 epitaxial thin films

Cited by 29 publications

References 32 publications

Interdependence of piezoelectric coefficient and film thickness in LiTaO3 cantilevers

Interdependence of piezoelectric coefficient and film thickness in LiTaO3 cantilevers

Impedance Spectroscopy of Lead-Free Ferroelectric Coatings

Dielectric and Energy Storage Properties of Ba(1−x)CaxZryTi(1−y)O3 (BCZT): A Review

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Interdependence of piezoelectric coefficient and film thickness in LiTaO₃ cantilevers

Interdependence of piezoelectric coefficient and film thickness in LiTaO₃ cantilevers