2011 IEEE 20th Conference on Electrical Performance of Electronic Packaging and Systems 2011
DOI: 10.1109/epeps.2011.6100199
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Impact of Through-Silicon-Via capacitance on high frequency supply noise in 3D-stacks

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Cited by 8 publications
(5 citation statements)
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“…As shown in Fig 1, Typically PIG TSVs are made bigger to minimize electro migration and reliability issues. Their larger sizes also means they have significant capacitance which can act as extra on chip distributed decap, reducing high frequency dildt noise [5]. Even at lower frequency the increase of effective inductance (due to the reduction in number of power pins) is countered by dampening effect provided by increase of resistance.…”
Section: A Power Delivery Modelmentioning
confidence: 99%
“…As shown in Fig 1, Typically PIG TSVs are made bigger to minimize electro migration and reliability issues. Their larger sizes also means they have significant capacitance which can act as extra on chip distributed decap, reducing high frequency dildt noise [5]. Even at lower frequency the increase of effective inductance (due to the reduction in number of power pins) is countered by dampening effect provided by increase of resistance.…”
Section: A Power Delivery Modelmentioning
confidence: 99%
“…The main difference between the proposed model and previous models [6]- [13] that the ground plane is approximated by the cell placing areas and the proposed model is simplified by the small ground area surrounding each TSV. Fig.…”
Section: B Electrical Model Of Tsv-to-tsv Coupling With Substratementioning
confidence: 99%
“…Especially, in designs with bulk CMOS technologies, many substrate contacts are used to avoid latch-up and to maintain back-gate bias constantly. Some circuit models that consider these substrate contacts have been proposed [6]- [13]. Most of them focused on the substrate noise and presented modeling and analysis results for substrate noise coupling in analog, RF, and digital circuits.…”
Section: Introductionmentioning
confidence: 99%
“…The corresponding TSV resistances and capacitances are extracted from 3-D TCAD simulation. The TCAD simulation accurately accounts for the MOS capacitance of the P/G TSVs as described in our earlier work [20], [24]. The TSV inductance is referenced from the work of Katti et al [25].…”
Section: B Supply Modeling With a 3-d Rlc Power Gridmentioning
confidence: 99%