Impedance Analysis of Liquid Film Formed on Electrically Stressed Cr Thin Films

Ghosh, Swapnendu N.; Talukder, Santanu

doi:10.1109/tnano.2023.3310501

Cited by 2 publications

(1 citation statement)

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“…The frequency and other parameters of the applied electric field also play a major role in the process and the most aggressive liquid material formation was observed when a 250 Hz alternating electric field was applied [16][17][18]. With the help of wet chemical tests as well as various material characterization studies, including energy dispersive x-ray spectroscopy (EDAX), Fourier transform infrared (FTIR) spectroscopy and Raman spectroscopy, it was inferred that the liquid region is made of chromium (VI) oxides [13,19]. Thus, the chemical reaction that results in the said material formation is given by the following equation [13]:…”

Section: Introductionmentioning

confidence: 99%

Decrypting the thermal effects on the electric field-induced material formation process on Cr thin films

Ghosh,

Talukder

2023

Phys. Scr.

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Controlled electrochemical reactions on chromium (Cr) thin films have been employed to create micro- and nano-scale patterns using a scanning probe-based patterning process called electrolithography (ELG). The electrochemical reaction produces a liquid material. The ELG process, being a local anodic oxidation-based technique, is significantly affected by several factors, including various ambient conditions. In this article, we explore the effects of temperature on the said electrochemical reaction-induced liquid material formation process. Keeping other ambient conditions constant, the temperature is varied over a large range, and we observe that a 40 °C change in temperature results in a 20-time change in the radial spread of the liquid region. This observation is thereafter explained by the effect of temperature on three different parameters affecting the rate of electrochemical reaction. Thus, based on this study, we can say that temperature is one of the most crucial parameters which can be used to confine the lateral spread of the formed liquid region and thereby improve the resolution of the patterns created using the ELG technique.

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