Implementation of fully-differential capacitance sensing accelerometer using glass proof-mass with Si-vias

Hsu, Yi-Chang; Lin, Chang-Yi; Sun, Chih-Ming; Hsu, Chia-Pao; Lee, Yu-Tao; Tsai, Ming-Han; Liu, Yu‐Chia; Fang, Weileun

doi:10.1109/memsys.2011.5734493

Cited by 8 publications

(4 citation statements)

References 7 publications

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“…This can be modified without difficulty by masking the glass isolation block during the DRIE process (figure 3(c)). Compared to other reported XY-stages, the glass isolation block approach used in this work can be substantially advantageous in terms of structural rigidity and electrical stability [22]. Reflowed borosilicate glass which has the same thickness as the silicon structural layer has adequate solidity and cementing power to ensure a stable actuation of the scanner even in the high frequency region [23].…”

Section: Device Fabricationmentioning

confidence: 99%

Two-dimensional optical scanner with monolithically integrated glass microlens

Yoo¹,

Jin²,

Ha³

et al. 2014

J. Micromech. Microeng.

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A miniaturized two-dimensional forward optical scanner with a monolithically integrated glass microlens was developed for microendoscopic imaging applications. The fabricated device measures 2.26 × 1.97 × 0.62 mm3 in size and a through-silicon microlens with a diameter of 400 µm and numerical aperture of 0.37 has been successfully integrated within the silicon layer. An XY stage structure with lens shuttle and comb actuators was designed, and proprietary glass isolation blocks were utilized in mechanical and electric isolation of X- and Y-axis actuators. Resonant frequencies of the stage in X and Y directions were 3.238 and 2.198 kHz and quality factors were 168 and 69.1, respectively, at atmospheric pressure. Optical scanning test has been performed and scan angles of ±4.7° and ±4.9° were achieved for X and Y directions, respectively.

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Section: Device Fabricationmentioning

confidence: 99%

Two-dimensional optical scanner with monolithically integrated glass microlens

Yoo¹,

Jin²,

Ha³

et al. 2014

J. Micromech. Microeng.

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“…Gou and Li proposed a multi-range piezoresistive accelerometer with four different sensors in a single die to detect the range of 10 to 10000 g [14]. Yamane et al introduced a novel 3-by-3 arrayed MEMS accelerometer for a CMOS-MEMS motion sensor, where a wide range of measurements and a minimal chip size would help to monitor various human activities continuously [15].…”

Section: Introductionmentioning

confidence: 99%

A novel design of capacitive MEMS multi-range accelerometer; FEM and numerical approach

Ahmadian Koochaksaraie,

Barazandeh,

Barati

2023

Phys. Scr.

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Sensing the acceleration with high dynamic range follows space and size limitations and many errors and inconveniences caused by using multiple accelerometers on a single structure. A novel MEMS capacitive accelerometer with a dual-spring system has been proposed to address this issue. Such a design is a single device with two sensitivities in different sensing ranges. It increases the dynamic range of the sensing by incorporating the supporting springs at high accelerations. Therefore, the sensor can sense a more comprehensive dynamic range while maintaining the required resolution in different ranges. The design parameters of the sensor, such as the thickness of the structural layer, the size of the sensor, and the width of the spring beams, have been investigated. The mechanical sensitivity in the first range is 0.082 μm⁄g. For the second range, it is 0.0015 to 0.0091 μm⁄g depending on the supportive springs' width.Moreover, the natural frequency of the device is 1740 Hz. The capacitance change of the proposed sensor is 7 fF/g on average for the first range and 0.08 to 0. 48 fF/g for different configurations in the second range. Utilizing such sensors with changeable stiffness in different ranges can reduce the sensor footprint and fabrication cost and increase reliability.

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“…Yi-chang Hsu has proposed a accelerometer which has a glass proof mass, the sensitivity is 14.44mv/g with a nonlinearity of 4.91% [3].…”

Section: Introductionmentioning

confidence: 99%

Optimization and analysis of micro capacitive comb accelerometer

Wang

2015

2015 16th International Conference on Electronic Packaging Technology (ICEPT)

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In this paper the design optimization of capacitive comb accelerometer is discussed. The accelerometer could sense acceleration in x direction which achieves this function implementing several flexible hinges suspending a proof-mass. The flexible hinges are used to enhance the sensitivity and the geometry parameters are optimized in this paper. A static, electrostatic simulation has been conducted. The COMSOL software is used to get the sensitivity and resonant frequency of the accelerometer, the solid mechanics module and electrostatic module are mainly used. The modal analysis simulation result shows that the resonant frequency of the accelerometer is 5240.8Hz. The sensitivity is 4.248mv/g. The total noise equivalent acceleration is Keywords-comb finger accelerometer; flexible hinge; finite element simulationI.

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Implementation of fully-differential capacitance sensing accelerometer using glass proof-mass with Si-vias

Cited by 8 publications

References 7 publications

Two-dimensional optical scanner with monolithically integrated glass microlens

Two-dimensional optical scanner with monolithically integrated glass microlens

A novel design of capacitive MEMS multi-range accelerometer; FEM and numerical approach

Optimization and analysis of micro capacitive comb accelerometer

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