2011
DOI: 10.1016/j.diamond.2011.08.003
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Improved adhesion and tribological properties of fast-deposited hard graphite-like hydrogenated amorphous carbon films

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Cited by 17 publications
(12 citation statements)
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“…Thin silica-like lms deposited by PECVD have been used as low-k dielectric lms in microelectronics [20][21][22] and barrier/protective layers. [23][24][25] The expanding thermal plasma chemical vapor deposition (ETP-CVD) has emerged as a valid technique for the deposition of several thin materials including silica or silica-like lms, 26 amorphous carbon 27,28 and ZnO. 29,30 The main difference between the ETP-CVD and the conventional RF-PECVD is the absence of ion bombardment during the deposition, due to the very low electron temperature in the downstream region, therefore the limited developed self-bias voltage, i.e.…”
mentioning
confidence: 99%
“…Thin silica-like lms deposited by PECVD have been used as low-k dielectric lms in microelectronics [20][21][22] and barrier/protective layers. [23][24][25] The expanding thermal plasma chemical vapor deposition (ETP-CVD) has emerged as a valid technique for the deposition of several thin materials including silica or silica-like lms, 26 amorphous carbon 27,28 and ZnO. 29,30 The main difference between the ETP-CVD and the conventional RF-PECVD is the absence of ion bombardment during the deposition, due to the very low electron temperature in the downstream region, therefore the limited developed self-bias voltage, i.e.…”
mentioning
confidence: 99%
“…(6) or Eq. (8). Obviously, @h j @t j h j;0 is a slope of the deposition curve in Figure 6 when the effective film thickness of component j is h j;0 , i.e., h j ¼ h j;0 , and therefore, the corresponding laser power P j ðt 0 Þ can be easily obtained by using linear interpolation.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…This is a popular technique to fabricate a film with advanced and/or improved functionality by designing a film with more than one material. For example, interlayer and multilayer techniques [6][7][8][9][10][11] have been used to improve the adhesion strength of diamond-like carbon (DLC) films. As well known, a large internal compressive stress exists in DLC films regardless of the growth technique, and the film starts to peel off from the substrate when this large compressive stress reaches a certain level.…”
mentioning
confidence: 99%
“…Graphite‐like amorphous carbon and its composites are a subdivision of amorphous carbon. They contain a high ratio of sp 2 bonds, which provide desirable physical properties such as chemical inertness, high hardness, excellent friction and wear performance, good electrical conductivity, and biocompatibility . These advantageous properties suggest these materials could be highly suitable for coating applications for biomedical devices, automotive compartments, and membranes, among others …”
Section: Introductionmentioning
confidence: 99%