2009
DOI: 10.1002/app.29774
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Improved biocompatibility of parylene‐C films prepared by chemical vapor deposition and the subsequent plasma treatment

Abstract: The purpose of this study is to prepare the thin film of C-type parylene (C-type polyxylylene, parylene-C) with improved biocompatibility for the biomedical applications, since in spite of the popularity, the parylene-C has been known to have the less biocompatibility than the N-type or D-type parylene. To prepare the welldesigned parylene films through the chemical vapor deposition (CVD) process and the subsequent plasma surface treatment, the parameters of deposition and surface modification were controlled … Show more

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Cited by 74 publications
(45 citation statements)
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“…3d depicts the I D -V GS curves of selectively treated sensors tested 45 and 90 days after plasma exposure respectively, indicating that H + sensitivity is slightly lower in the long-term, nevertheless, it still persists. The induced hydrophilicity of oxygen plasma treated Parylene C has been previously attributed to the formation of free carboxyl groups that are prone to bind with hydrophilic molecules [13,14]. The reactions that take place between the hydrophilic groups result in a diminished number of free binding sites on the film surface.…”
Section: Selectively O 2 Plasma Treated Parylene Cmentioning
confidence: 99%
See 1 more Smart Citation
“…3d depicts the I D -V GS curves of selectively treated sensors tested 45 and 90 days after plasma exposure respectively, indicating that H + sensitivity is slightly lower in the long-term, nevertheless, it still persists. The induced hydrophilicity of oxygen plasma treated Parylene C has been previously attributed to the formation of free carboxyl groups that are prone to bind with hydrophilic molecules [13,14]. The reactions that take place between the hydrophilic groups result in a diminished number of free binding sites on the film surface.…”
Section: Selectively O 2 Plasma Treated Parylene Cmentioning
confidence: 99%
“…Many research efforts have been realized to alter the hydrophobic properties of Parylene C with particular focus on the biomedical applications. Oxygen plasma treatment has been previously employed to effectively modify the surface properties of such films [13,14], with special emphasis on utilizing the material as a cell culture substrate [15,16]. In other studies, Parylene has been employed for patterning cells and proteins either by enhancing attachment of proteins after UV exposure [17], or as a peel-off stencil [18].…”
Section: Introductionmentioning
confidence: 99%
“…There are several variations of Parylene based on its monomer derivatives [16]. Parylene-C is a thermoplastic, crystalline and transparent polymer that is extensively used as a coating for insulating implantable biomedical devices [17].…”
Section: Introductionmentioning
confidence: 99%
“…[42][43][44][45] It is also worth noting that the XPS analysis did not show noticeable changes in oxygen content of the surface. The effect of the electron beam through water vapor is therefore different from oxygen plasma treatment, which is well known to increase the hydrophilicity of parylene-C. [46][47][48][49] Furthermore, the effect of an oxygen plasma treatment tends to weaken in a few days as the parylene-C film recovers some of its hydrophobicity. [50] In our method the patterns retain superhydrophilicity even after a year, making the treatment practically permanent.…”
mentioning
confidence: 99%