High-temperature piezoelectric films with excellent piezoelectric
and ferroelectric properties lay the foundation for the development
of high-temperature piezo-MEMS devices. However, due to the poor piezoelectricity
and strong anisotropy, it remains a challenge to obtain high quality
Aurivillius-type high-temperature piezoelectric films with high performance,
which impedes their practical implements. Here, a feasible polarization
vector regulation strategy associated with oriented epitaxial self-assembled
nanostructures for enhancing electrostrain is proposed. Guided by
lattice matching relation, non-c-axis oriented epitaxial
self-assembled Aurivillius-type calcium bismuth niobate (CaBi2Nb2O9, CBN) high-temperature piezoelectric
films were successfully prepared on different oriented Nb-STO substrates.
By the lattice matching relationship, hysteresis measurement, and
piezoresponse force microscopy analysis, it is confirmed that the
polarization vectors transform from a two-dimensional plane to a three-dimensional
space, and the out-of-plane polarization switching is enhanced. A
platform for more possible polarization vectors is provided in the
self-assembled (013)CBN film. More importantly, enhanced ferroelectric
(P
r ∼ 13.4 μC/cm2) and large strain (∼0.24%) were obtained in the (013)CBN
film, which promotes the great application prospect of CBN piezoelectric
films in high-temperature MEMS devices.