2009
DOI: 10.1016/j.apsusc.2009.05.094
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Improved electrical properties of silicon-incorporated anodic niobium oxide formed on porous Nb–Si substrate

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Cited by 9 publications
(1 citation statement)
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“…There is growing interest in amorphous oxides for use as functional materials in a wide range of applications in the field of electrical, optical, chemical, and environmental engineering. For example, amorphous Al 2 O 3 (a-Al 2 O 3 ), a-Ta 2 O 5 , and a-Nb 2 O 5 are considered good coating materials for electrical, [1][2][3][4] biomedical, 5 and optical devices [6][7][8] because of their excellent dielectric, corrosion resistance, and reflective properties, respectively. For practical uses, the thermal stability of the layer is an important factor.…”
Section: Introductionmentioning
confidence: 99%
“…There is growing interest in amorphous oxides for use as functional materials in a wide range of applications in the field of electrical, optical, chemical, and environmental engineering. For example, amorphous Al 2 O 3 (a-Al 2 O 3 ), a-Ta 2 O 5 , and a-Nb 2 O 5 are considered good coating materials for electrical, [1][2][3][4] biomedical, 5 and optical devices [6][7][8] because of their excellent dielectric, corrosion resistance, and reflective properties, respectively. For practical uses, the thermal stability of the layer is an important factor.…”
Section: Introductionmentioning
confidence: 99%