“…The peaks can be tted by three peaks centered at 530.1, 531.6, and 533.2 eV, namely O L , O V , O C , respectively, which corresponds to lattice oxygen, oxygen vacancies, and chemisorbed oxygen in decient regions, respectively. 53,56,57 The result shows that the amounts of oxygen vacancies are 21.1%, 30.3%, and 32.1% in oxygen-annealing, air-annealing, and nitrogen-annealing Co 3 O 4 lms, respectively. These results revealed that oxygen vacancies concentration or area of defect is higher in nitrogen annealed Co 3 O 4 lms as compared to oxygen and air annealed stacks.…”