2015
DOI: 10.1016/j.mssp.2015.07.045
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Improved multi-recessed 4H–SiC MESFETs with double-recessed p-buffer layer

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Cited by 9 publications
(3 citation statements)
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“…The simulation results show that when the frequency was 1 GHz, the C gs values of the conventional HEMT and HGMRB HEMT were 2794.49 pF/mm and 2410.57 pF/mm, respectively, and the C gs value of the new structure was about 506 pF/mm lower than the conventional structure. Due to the existence of the high gate, when V gs = 0 V, the depletion region could only diffuse vertically downward [17], while the depletion region under the conventional structure gate diffused to both the source and the drain, and the capacitance area increased [18]. The simulation results show that the depth of the depletion region below the gate of the new structure was deeper than that of the conventional structure.…”
Section: Resultsmentioning
confidence: 99%
“…The simulation results show that when the frequency was 1 GHz, the C gs values of the conventional HEMT and HGMRB HEMT were 2794.49 pF/mm and 2410.57 pF/mm, respectively, and the C gs value of the new structure was about 506 pF/mm lower than the conventional structure. Due to the existence of the high gate, when V gs = 0 V, the depletion region could only diffuse vertically downward [17], while the depletion region under the conventional structure gate diffused to both the source and the drain, and the capacitance area increased [18]. The simulation results show that the depth of the depletion region below the gate of the new structure was deeper than that of the conventional structure.…”
Section: Resultsmentioning
confidence: 99%
“…And after the transconductance reaches the saturation region, as the gate voltage increased, the extension of the transconductance decreases. [22,23] The notch-structure HEMTs do have an improvement in the GVS. And the double-notch structure HEMT has a maximum GVS, which is a 30% improvement compared with the conventional HEMT.…”
Section: Transfer Characteristicsmentioning
confidence: 99%
“…The notch structure in the AlGaN barrier layer proves to reduce the concentration of the two-dimensional electron gas (2DEG) within the channel and also suppress the peak electric field beside the gate electrode. [18][19][20][21][22][23] The notch structure is achieved by an inductively coupled plasma (ICP) etching system at the AlGaN barrier layer, and the notch structure is parallel to the gate. In this work, the 5 types of notch-structure AlGaN/GaN HEMTs are compared with each other, and their structures to be investigated are named as follows: type-1 referring to the conventional AlGaN/GaN HEMT without a notch structure, type-2 denoting the notch-structure HEMT where the notch is next to the gate and has a depth of 10 nm, type-3 representing the notch-structure HEMT with the notch position being the same as the type-2 but a depth being 15 nm, type-4 being the notch-structure HEMT where the notch is 200 nm away from the gate and has a depth of 10 nm, type-5 signifying the notch-structure HEMT with the notch position being the same as the type-4 but the notch depth being 15 nm, and the type-6 meaning the double-notch structure HEMT where the left notch is 200 nm away from the gate and the right notch is 200 nm away from the left one and they have the same notch depth of 15 nm.…”
Section: Introductionmentioning
confidence: 99%