Improved RSOL planar calibration via EM modelling and reduced spread resistive layers

Spirito, M.; Galatro, L.; Lorito, G.; Zoumpoulidis, T.; Mubarak, Faisal

doi:10.1109/arftg.2015.7381473

Cited by 9 publications

(5 citation statements)

References 9 publications

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“…12. Photograph of 0.5-and 5-k CPW impedance standards manufactured on a fused-silica substrate, using a dedicated aluminum on titanium process developed at the Delft University of Technology [24], [25]. Fig.…”

Section: Measurement Experiments and Discussionmentioning

confidence: 99%

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Noise Behavior and Implementation of Interferometer-Based Broadband VNA

Mubarak

Romano²,

Galatro³

et al. 2019

IEEE Trans. Microwave Theory Techn.

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This paper analyzes and accurately models the complex noise behavior of vector network analyzers (VNAs) when measuring large-mismatch devices and subsequently shows how the VNA measurement noise performance is enhanced through implementation of a high-speed, broadband, active RF interferometer module. The presented VNA noise model provides a solid framework, benchmarked by measurement data, to analyze existing RF interferometer approaches. The performance improvement of the proposed interferometer implementation is then benchmarked in terms of magnitude and phase stability of the renormalized impedance level. A test bench employing the novel add-on RF interferometer module is presented and demonstrated to achieve high-speed cancellation of the scattered wave over a broad frequency band. The first experiment shows ultralow noise in a 1-18 GHz broadband measurement of co-planar waveguide 0.5-and 5-k impedance standards. Employing the proposed hardware setup improves the noise uncertainty for the 5-k impedance standard by a factor of 8 and 20 at 1 and 18 GHz, respectively. In the second experiment, a factor of 2 height-resolution enhancement is achieved in a scanning microwave microscope when the RF interferometer module is added to the instrument.

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Section: Measurement Experiments and Discussionmentioning

confidence: 99%

“…12. The impedance standards are designed with nominal impedance of 0.5 (Z low ) and 5 k (Z high ) [24], [25].…”

Section: A Broadband Planar Measurementsmentioning

confidence: 99%

Noise Behavior and Implementation of Interferometer-Based Broadband VNA

Mubarak

Romano²,

Galatro³

et al. 2019

IEEE Trans. Microwave Theory Techn.

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“…We used the models provided by the vendor for the SOL standards. More accurate models e.g., based on full-wave simulation of SOL standards [19]- [20] can be used for the extraction. In addition, the SOL method can be replaced with an over-determined set of offset shorts for probe characterization [21].…”

Section: B On-wafer Calibrationmentioning

confidence: 99%

Calibration on the Fly—A Novel Two-Port S-Parameter Measurement Method for On-Wafer Leaky Systems

Liu

Liang

et al. 2020

IEEE Trans. Microwave Theory Techn.

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In this paper, we present a two-port on-wafer scattering parameter measurement method to tackle the issue of crosstalk between probes. The proposed method treats the crosstalk separately during the system calibration and the device measurement stages, because the crosstalk during these stages is often different due to changes in the measurement conditions after the probes have been calibrated. For example, devices under test (DUTs) and calibration standards are often situated on different substrates, or, the distance between probes during calibration is different from that during DUT measurement. Based on this concept, we develop a new error model in which the crosstalk is treated as a standalone two-port error network in parallel with the two-port calibration standards or DUTs. The two-port crosstalk error generated during probing, ECT, is removed in the system calibration and corrected during the measurement of the DUT by using a dummy pair of open-circuit standards that are fabricated on the same substrate as the DUT. Since the crosstalk is corrected while measuring the DUT, rather than during system calibration, we call this method "calibration on the fly" (COF). The method is demonstrated using measurements of a 10-dB attenuator between 140 GHz and 220 GHz.

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“…To improve the accuracy of the standard definitions, and thus, in turn of the probe level calibration, this work described the procedures for the extraction, as a function of temperature, of the electrical parameters of the conductive and dielectric layers composing two commercially available impedance standard substrates (i.e., Alumina-based and Quartz-based). Furthermore, the mechanical shrinkage due to the temperature change from room temperature to cryogenic one is derived, and the method of [8] and [9] is employed to define the frequency-dependent response of the artifacts used in the calibration procedure.…”

Section: Introductionmentioning

confidence: 99%

Impedance Standard Substrate Characterization and EM model definition for Cryogenic and Quantum-Computing Applications

Shokrolahzade,

Sebastiano,

Mubarak

et al. 2023

2023 IEEE/MTT-S International Microwave Symposium - IMS 2023

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In this contribution, we describe the modeling approaches and the characterization procedures used to develop accurate standard models for cryogenic, probe-level, calibrations substrates.The key electrical and mechanical parameters of the impedance terminations and the lines used in commercially available impedance standard substrates are first characterized versus temperature. After, these component are simulated using 2.5D EM solvers including their mechanical variation when exposed to cryogenic temperatures, to extract their nominal response at 7 Kelvin. The quality of the resulting calibrations at cryogenic is evaluated first using independent CPW lines on the calibration substrates and then by measuring the response of a transformerbased resonator realized on a Si-based technology.Ambient temperature models are used as a comparison, to highlight the accuracy improvement that can be achieved employing optimized Cryo-EM based models.

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Improved RSOL planar calibration via EM modelling and reduced spread resistive layers

Cited by 9 publications

References 9 publications

Noise Behavior and Implementation of Interferometer-Based Broadband VNA

Noise Behavior and Implementation of Interferometer-Based Broadband VNA

Calibration on the Fly—A Novel Two-Port S-Parameter Measurement Method for On-Wafer Leaky Systems

Impedance Standard Substrate Characterization and EM model definition for Cryogenic and Quantum-Computing Applications

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