2005
DOI: 10.1016/j.jcrysgro.2004.12.114
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Improvement of crystal quality of GaInNAs films grown by atomic hydrogen-assisted RF-MBE

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Cited by 41 publications
(35 citation statements)
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“…The GaInNAs films were grown by atomic hydrogenassisted molecular beam epitaxy ͑H-MBE͒ with a radiofrequency ͑rf͒ nitrogen plasma source. 12,13 We found that although the hole mobilities in Be-doped p-GaInNAs films exhibit a temperature dependence that is nearly identical to that for the homoepitaxial p-GaAs films doped with Be, the electron mobilities in Si-doped n-GaInNAs films are strongly correlated with the presence of N and Si atoms.…”
mentioning
confidence: 80%
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“…The GaInNAs films were grown by atomic hydrogenassisted molecular beam epitaxy ͑H-MBE͒ with a radiofrequency ͑rf͒ nitrogen plasma source. 12,13 We found that although the hole mobilities in Be-doped p-GaInNAs films exhibit a temperature dependence that is nearly identical to that for the homoepitaxial p-GaAs films doped with Be, the electron mobilities in Si-doped n-GaInNAs films are strongly correlated with the presence of N and Si atoms.…”
mentioning
confidence: 80%
“…12,13 Si and Be, both of which were standard MBE-grade solid sources, were used as n-type and p-type dopants, respectively, and the carrier concentration at 300 K was varied from 2 ϫ 10 16 to 1 ϫ 10 18 cm −3 . The GaInNAs layers of 1 m thickness were grown at a fixed growth temperature of 480°C.…”
Section: Methodsmentioning
confidence: 99%
“…All growths were done by atomic hydrogen-assisted solid-source molecular beam epitaxy (H-MBE) with a radio frequency (RF) nitrogen plasma source [12,13]. We fabricated multi-stacked InAs/GaNAs QDSC on n + -GaAs (001) substrate as shown in Fig.…”
Section: Methodsmentioning
confidence: 99%
“…The other driving force is exclusion, which takes place during the cooling process of the grain. When the temperature of the crystallite lattice decreases, the V O is provided with an escaping tendency from inner bulk to the surface of grains [24,25]. Mathematically, P is used to denote the jump probability of an oxygen defect from a place to a nearby position in unit time.…”
Section: The Gdov Modelmentioning
confidence: 99%