Improvement of Electric-Field-Assisted Ion Exchange Method  for Planar Microlens Array Fabrication

Katayama, Takeo; Munetaka, Yuki; Iga, Kenichi

doi:10.1143/jjap.38.775

Cited by 8 publications

(3 citation statements)

References 3 publications

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“…The planar microlens array (PMLA) is an important optical element because the focal length of the unit lenses is short meanwhile the NA and imaging resolution are relatively high [35,36]. In glass, ion-exchange techniques can produce gradient-refractive-index structures, as shown in Fig.…”

Section: Ion-exchange Methodsmentioning

confidence: 99%

Fabrication, characterization, and applications of microlenses

et al. 2015

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Microlenses (MLs) and microlens arrays (MLAs) are assuming an increasingly important role in optical devices. In response to this rapid evolution in technology, emphasis is being placed on research into new manufacturing methods for these devices as well as the characterization of their performance. This paper provides an overview of the fabrication of MLs and MLAs by electrical, mechanical, chemical, and optical methods. As each processing method has distinct advantages and limitations, the most significant characteristic parameters and the measurement of these parameters are discussed for each method. These parameters are then used as indices to evaluate and improve each of the processing methods. Some examples of practical applications of MLAs, especially for micromechanical optoelectronic devices, are also given. This paper aims to summarize the present development and the state of the art in processing technology of MLs and MLAs.

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Section: Ion-exchange Methodsmentioning

confidence: 99%

Fabrication, characterization, and applications of microlenses

et al. 2015

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“…Elaborate optical devices like the Maxwell fish-eye lens, the Luneburg lens, and the Eaton lens are based on spatially variable refractive index structure. 1,2 With bulk solid materials, the establishment of a gradient refractive index profile involves complex fabrication processes such as microcontrolled dipcoating, field-assisted ion-exchange, 3 or vapor deposition 4,5 and the functionalities cannot be changed after the fabrication. Natural transparent solids possess inherently small positive refraction indexes, except for a few semiconductors and insulators, such as lead sulphide or strontium titanate, which exhibits a relatively high peak refractive index at mid-and far-infrared frequencies.…”

Section: Introductionmentioning

confidence: 99%

Broadband gradient refractive index planar lens based on a compound liquid medium

Han

Tian

et al. 2012

Journal of Applied Physics

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We have proposed a new method to achieve gradient refractive-index (GRIN) optics via a compound liquid medium. By adjusting the composition of the liquid medium, the refractive index of the compound liquid was tuned in a very broad range from 1.58 to 5.15. The liquid medium also exhibited weak frequency dependence. Based on these properties, we designed a liquid GRIN planar lens and experimentally demonstrated the feasibility of this approach. The beam deflection of the lens was controlled by adjusting the distribution of the refractive-index of the lens. By changing the composition of the compound liquids in different cells of the lens framework, different spatial gradually varied refractive index profiles have been achieved. The proposed liquid planar lens has shown a good directive property at different receiving angles and demonstrated a broadband performance between 12 GHz and 15 GHz. This method results in a rapid and flexible realization of gradient refractive index structures by using liquid medium. V

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“…Moreover, the system is bulky which leads to problems of stability. To avoid these problems, we have proposed stacked planar optics 1, 2) consisting of planar and 2-D arrayed optical components such as microlenses, [3][4][5][6] filters and so on. Subsequently, using the stacked planer optics concept, the authors and former cooperative researchers have proposed and investigated a parallel optical pattern recognition system 7,8) which is composed of planar microoptical devices and based on the Walsh spatial frequency domain filtering (WSFDF), as shown in Fig.…”

Section: Introductionmentioning

confidence: 99%

Impacts of CF⁺, CF₂ ⁺, CF₃ ⁺, and Ar Ion Beam Bombardment with Energies of 100 and 400 eV on Surface Modification of Photoresist

Takeuchi

Amasaki

Kondo

et al. 2011

Jpn. J. Appl. Phys.

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An optical parallel processor for an image recognition system using microoptical devices has been developed. This system expands input images to coefficients of a two-dimensional Walsh spatial frequency domain and discriminates them by performing the inner product to the reference filter. In this paper, we demonstrate parallel optical discrimination of Arabic numerals using this method. First, the mechanism of this recognition method is presented. Next, the reference filter is designed. In order to implement the reference filter by using the microoptical devices, the fabrication problems were solved. Finally, the recognition system is constructed and effects of deformation on the input image are experimentally evaluated.

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Improvement of Electric-Field-Assisted Ion Exchange Method for Planar Microlens Array Fabrication

Abstract: We propose a new processing technique to reproducibly fabricate gradient-index planar microlenses. A uniform microlens array consisting of 300 1-mm-diameter microlenses was successfully realized.

Cited by 8 publications

References 3 publications

Fabrication, characterization, and applications of microlenses

Fabrication, characterization, and applications of microlenses

Broadband gradient refractive index planar lens based on a compound liquid medium

Impacts of CF⁺, CF₂ ⁺, CF₃ ⁺, and Ar Ion Beam Bombardment with Energies of 100 and 400 eV on Surface Modification of Photoresist

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Improvement of Electric-Field-Assisted Ion Exchange Method for Planar Microlens Array Fabrication

Abstract: We propose a new processing technique to reproducibly fabricate gradient-index planar microlenses. A uniform microlens array consisting of 300 1-mm-diameter microlenses was successfully realized.

Cited by 8 publications

References 3 publications

Fabrication, characterization, and applications of microlenses

Fabrication, characterization, and applications of microlenses

Broadband gradient refractive index planar lens based on a compound liquid medium

Impacts of CF+, CF2 +, CF3 +, and Ar Ion Beam Bombardment with Energies of 100 and 400 eV on Surface Modification of Photoresist

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Impacts of CF⁺, CF₂ ⁺, CF₃ ⁺, and Ar Ion Beam Bombardment with Energies of 100 and 400 eV on Surface Modification of Photoresist