Improvement of High-Temperature Stability of Al2O3/Pt/ZnO/Al2O3 Film Electrode for SAW Devices by Using Al2O3 Barrier Layer

Liu, Xingpeng; Peng, Bin; Zhang, Wanli; Zhu, Jun; Liu, Xingzhao; Wei, Meng

doi:10.3390/ma10121377

Cited by 17 publications

(4 citation statements)

References 20 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Depending on the applied metallization and substrate, additional barrier and cover layers might be required to prevent a chemical reaction between the substrate and the metallization or the metallization and the surrounding atmosphere. In contrast to investigations reported in the literature, which are mainly restricted to electrode materials based on noble metals such as Pt, Pd, or Ir [1][2][3][4][5][6][7][8][9][10], we developed high-temperature stable electrode systems made of the intermetallics TiAl [11,12] or RuAl on Ca 3 TaGa 3 Si 2 O 14 (CTGS) substrates [13][14][15]. In combination with suited cover layers, these metallizations provide sufficient oxidation resistance at high temperatures.…”

Section: Introductionmentioning

confidence: 99%

Study of the Long-Term High-Temperature Structural Stability of RuAl Electrodes for Microelectronic Devices

Seifert,

Leszczynska,

Gemming

2024

Materials

View full text Add to dashboard Cite

The high-temperature stability of RuAl-based electrodes for application in microelectronic devices is analyzed for long-term duration. The electrodes are prepared on Ca3TaGa3Si2O14 (CTGS) substrates using SiO2 and Al-N-O cover and barrier layers as oxidation protection. The samples are annealed at 600, 700, or 800 °C in air for 192 h. Minor degradation is observed after thermal loading at 700 °C. The annealing at 800 °C for 192 h leads to a partial oxidation of the Al in the extended contact pad and to a complete oxidation of the Al within the structured interconnect electrodes. The different degradation of the interconnect electrodes and the contact pads is caused by their different lateral dimensions. In summary, long-term high-temperature stability is demonstrated up to at least 700 °C in air. Less oxidizing atmospheres should allow the application at higher temperatures and for a significantly longer duration.

show abstract

Section: Introductionmentioning

confidence: 99%

Study of the Long-Term High-Temperature Structural Stability of RuAl Electrodes for Microelectronic Devices

Seifert,

Leszczynska,

Gemming

2024

Materials

View full text Add to dashboard Cite

show abstract

“…For example, alloys of different compositions have been found to have more stable conductivity at high temperatures [20][21][22][23][24]. In addition, Ti or Ta adhesion layers, [25][26][27][28][29][30] capping layers, [31] buffer layers, [15] and diffusion barriers [32][33][34] have also been applied to promote the hightemperature stability of electrode resistivity. Thus, as is known, creep occurs in metal films and forms hollows at sufficiently high temperatures, leading to an increase in resistance [14].…”

Section: Introductionmentioning

confidence: 99%

High‐Temperature Conductive Stability of ITO/Pt Bilayer‐Film Electrode for Applications in High‐Temperature SAW Devices

Mou

Peng

et al. 2022

Journal of Nanomaterials

Self Cite

View full text Add to dashboard Cite

Surface-acoustic-wave (SAW) devices have been widely investigated over many years as demand has grown for information sensing above 1000°C. At such high temperatures, metal electrode creep occurs, thereby causing the transformation of an electrode from a continuous uniform film to a discontinuous film with hollows or isolated grains. In this study, 100 nm thick ITO conductive oxide film is deposited on 100 nm thick Pt film to form an ITO/Pt bilayer-film composite electrode for high-temperature SAW devices. According to this way, the conductive stability of the Pt film electrode at high temperature can be greatly improved. Compared with the initial value, the electrical conductivity of single-layer 100 nm thick Pt film decreases to 65.4% with the area fraction of Pt at 64.1%. Meanwhile, the electrical conductivity of ITO/Pt bilayer-film decreases to only 95% with the area fraction of Pt at 63.1%. Then, the enhancement of high-temperature conductive stability can be attributed to the added ITO conduction channels. These findings demonstrate a potential route to design multilayer electrodes that can operate above 1000°C with promising applications in SAW devices needing to operate at high temperatures.

show abstract

“…In previous works, SAW sensors based on langasite (LGS, La 3 Ga 5 SiO 14 ) substrate and multilayer laminated film electrodes for high temperature applications have been investigated [19,20]. Following this research, ZnO thin film was deposited on the sensor to form a high-temperature oxygen gas sensor in this work.…”

Section: Introductionmentioning

confidence: 99%

The Investigation of High-Temperature SAW Oxygen Sensor Based on ZnO Films

et al. 2019

View full text Add to dashboard Cite

In this paper, a wireless oxygen sensor based on a surface acoustic wave (SAW) was reported. For high-temperature applications, novel Al2O3/ZnO/Pt multilayered conductive film was deposited on langasite substrate as the electrodes, and ZnO film obtained by the pulse laser deposition (PLD) method was used as the sensitive film. The measurements of X-ray diffraction (XRD) and a scanning electron microscope (SEM) showed that the c-axis orientation of the ZnO grains and the surface morphology of the films were regulated by the deposition temperature. Meanwhile, the gas response of the sensor was strongly dependent on the surface morphology of the ZnO film. The experimental results showed that the oxygen gas sensor could operate at a high-temperature environment up to 850 °C with good stability for a long period. The max frequency shift of the sensors reaches 310 kHz, when exposed to 40% O2 gas at 850 °C. The calculated standard error of the sensors in a high-temperature measurement process is within 3%. Additionally, no significant signal degradation could be observed in the long-term experimental period. The prepared SAW oxygen gas sensor has potential applications in high-temperature sensing systems.

show abstract

Improvement of High-Temperature Stability of Al2O3/Pt/ZnO/Al2O3 Film Electrode for SAW Devices by Using Al2O3 Barrier Layer

Cited by 17 publications

References 20 publications

Study of the Long-Term High-Temperature Structural Stability of RuAl Electrodes for Microelectronic Devices

Study of the Long-Term High-Temperature Structural Stability of RuAl Electrodes for Microelectronic Devices

High‐Temperature Conductive Stability of ITO/Pt Bilayer‐Film Electrode for Applications in High‐Temperature SAW Devices

The Investigation of High-Temperature SAW Oxygen Sensor Based on ZnO Films

Contact Info

Product

Resources

About