2007
DOI: 10.1016/j.jmmm.2006.11.185
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Improvement of in-plane anisotropy field in FeCoB/NiFe/Si thin films by Kr sputtering

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Cited by 8 publications
(5 citation statements)
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“…The easy and hard axes of magnetization were observed clearly in the in-plane orthogonal directions. The easy axis aligns parallel to the facing direction of FeCoB targets, 6,7 shown in Fig. 2͑a͒ indicated little magnetic anisotropy.…”
Section: Methodsmentioning
confidence: 95%
See 1 more Smart Citation
“…The easy and hard axes of magnetization were observed clearly in the in-plane orthogonal directions. The easy axis aligns parallel to the facing direction of FeCoB targets, 6,7 shown in Fig. 2͑a͒ indicated little magnetic anisotropy.…”
Section: Methodsmentioning
confidence: 95%
“…Such a high magnetic anisotropy is originated from magnetoelastic energy induced by the anisotropic residual stress caused by the oblique incidence effect of depositing particles, which may induce the distortion of FeCo lattices. 6,7 The application of a Ru underlayer seems to enhance this strain and to bring high H k to the FeCoB films. Figure 3 shows the degree of Ru ͑100͒, ͑002͒, and ͑101͒ orientations of a single Ru layer ͑100 nm͒ as a function of Ar gas pressure during the deposition of Ru layer.…”
Section: Methodsmentioning
confidence: 99%
“…2(b). Changes in lattice spacing of FeCo(11 0) plane, d (11 0) , were particularly focused, since a correlation between H k and d (11 0) was predicted in the previous research [3].…”
Section: Effect Of Substrate Heating Processesmentioning
confidence: 99%
“…The films discussed in the following were prepared on a glass substrate by Kr sputtering, which showed uniaxial anisotropy with H k of 280 Oe. Films fabricated by Kr sputtering possesses high H k even if deposited on a glass substrate without thermal processes [3]. Fig.…”
Section: Effect Of Post-deposition Annealing Processesmentioning
confidence: 99%
“…1,4,5 With the development of information technology and electromagnetic devices, the application of high-frequency soft magnetic films becomes more and more extensive, such as microwave absorber, micro-inductor, micro-transformer, and magnetic head with high writing speed. [6][7][8][9][10] Recently, CoIr film has a great application prospect for high-frequency application due to its novel high-frequency magnetic properties with negative K u grain . 11,12 For a soft magnetic film without considering magnetocrystalline anisotropy and with in-plane anisotropy (H u ) which satisfies H u ( 4pM s , the natural resonance frequency f r and the initial permeability l i are described as…”
Section: Introductionmentioning
confidence: 99%