2007
DOI: 10.1109/tim.2007.890619
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Improving the Measurement of the Diameter of Si Spheres

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Cited by 26 publications
(13 citation statements)
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“…For the target uncertainty the temperature of the sphere needs to be measured with an uncertainty of less than 1 mK. To reduce any effects of influencing the temperature of the sphere, thermocouple pairs measure the temperature difference between the sphere and a copper block inside the interferometer frame which acts as a reference body [5]. The temperature of this copper block is measured by common means, i.e.…”
Section: Experimental Setup Of the Spherical Fizeau Interferometermentioning
confidence: 99%
“…For the target uncertainty the temperature of the sphere needs to be measured with an uncertainty of less than 1 mK. To reduce any effects of influencing the temperature of the sphere, thermocouple pairs measure the temperature difference between the sphere and a copper block inside the interferometer frame which acts as a reference body [5]. The temperature of this copper block is measured by common means, i.e.…”
Section: Experimental Setup Of the Spherical Fizeau Interferometermentioning
confidence: 99%
“…The volume is determined from the measurement values of 280 diameters distributed nearly uniformly all over the surface of the sphere. The relative Figures 20 and 21 show the spherical-etalon interferometer developed by the PTB [86]. The aperture of the interferometer objectives is 60 • , allowing 16 000 simultaneous diameter measurements.…”
Section: Optical Interferometers For Silicon Spheresmentioning
confidence: 99%
“…The interferometer frame is placed inside a vacuum chamber to eliminate any influences of the refraction index of air. Furthermore, temperature fluctuations are reduced to some mK per day by a thermostatic control of the temperature of the vacuum chamber and a weak thermal contact to the interferometer frame [12]. The components of the illuminating and imaging optics are aligned symmetrically on both sides of the vacuum chamber.…”
Section: The Sphere Interferometermentioning
confidence: 99%