Improving the sensitive and selective of trace amount ozone sensor on Indium-Gallium-Zinc Oxide thin film by ultraviolet irradiation

Wu, Chau-Chung; Chang, Kai-Wei; Yu-ning, Li; Deng, Zu-Yin; Chen, Kuen-Lin; Jeng, Chien-Chung; Wu, Ren‐Jang; Chen, Jau-Han

doi:10.1016/j.snb.2018.07.075

Cited by 29 publications

(12 citation statements)

References 46 publications

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“…Table summarizes the key parameters for a-IGZO-based gas sensors that are published in the literature. The response times of a-IGZO thin films typically exceed several minutes. − Traditional gas sensors require an external bias to provide activation energy for gas desorption on the surface, but the self-powered device operates at 0 V. This is a possible reason that the response and recovery time are relatively long in our case. It is difficult to provide a fair evaluation of device performance compared with those of state-of-the-art a-IGZO-based gas sensors because measurement systems, geometric electrodes, operating conditions, and working voltages are different.…”

Section: Resultsmentioning

confidence: 99%

“…28−30 The sensitivity of a gas sensor increases rapidly as the grain size decreases when the grain radius approaches the Debye length, which is usually a few nanometers. 28 Therefore, a lack of grain boundaries makes a-IGZO suitable for the detection of low levels of NO 2 , 31,32 H 2 S, 33 and O 3 . 34 To operate an a-IGZO-based gas sensor at room temperature, a conventional heating apparatus is replaced by a UV-lightemitting diode (LED) to provide the activation energy.…”

Section: Introductionmentioning

confidence: 99%

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Realization of a Self-Powered InGaZnO MSM Ozone Sensor via a Surface State Modulated Photovoltaic Effect

Huang

2022

ACS Appl. Electron. Mater.

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Traditional gas sensors require an external voltage to provide a readout signal for measuring the resistance/current changes. To reduce the power consumption and working area for system-on-chip applications, photovoltaic self-powered gas sensors are a promising strategy. However, most of the reported self-powered gas sensors are based on a vertical p−n junction structure with two different electrodes located on opposite sides, which is incompatible with planar circuit technology. In this study, a metal−semiconductor−metal (MSM) selfpowered ozone (O 3 ) gas sensor based on a-IGZO is successfully fabricated using localized ultraviolet treatment (UVT) which is used to selectively modify the surface states underneath different contacts. The established asymmetric Schottky barrier results in self-powered characteristics under UV illumination. The self-powered gas sensor exhibits an unbiased gas response of 74% with a response/ recovery time of 168/522 s toward 5 ppm of O 3 at room temperature. The proposed method provides insights for easy fabrication of photovoltaic self-powered gas sensors using a highly integrated MSM structure.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Realization of a Self-Powered InGaZnO MSM Ozone Sensor via a Surface State Modulated Photovoltaic Effect

Huang

2022

ACS Appl. Electron. Mater.

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“…In the experiments conducted to determine the light response and ozone detection, we used ultraviolet (UV) light and blue light-emitting diode as light sources. These measurements are described in detail elsewhere [32,33,34].…”

Section: Methodsmentioning

confidence: 99%

The Response of UV/Blue Light and Ozone Sensing Using Ag-TiO2 Planar Nanocomposite Thin Film

Shih

2019

Sensors

Self Cite

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We successfully fabricated a planar nanocomposite film that uses a composite of silver nanoparticles and titanium dioxide film (Ag-TiO2) for ultraviolet (UV) and blue light detection and application in ozone gas sensor. Ultraviolet-visible spectra revealed that silver nanoparticles have a strong surface plasmon resonance (SPR) effect. A strong redshift of the plasmonic peak when the silver nanoparticles covered the TiO2 thin film was observed. The value of conductivity change for the Ag-TiO2 composite is 4–8 times greater than that of TiO2 film under UV and blue light irradiation. The Ag-TiO2 nanocomposite film successfully sensed 100 ppb ozone. The gas response of the composite film increased by roughly six and four times under UV and blue light irradiation, respectively. We demonstrated that a Ag-TiO2 composite gas sensor can be used with visible light (blue). The planar composite significantly enhances photo catalysis. The composite films have practical application potential for wearable devices.

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“…The development of new materials and methodologies for the sensing of targeted chemical species has the potential to be broadly useful in a range of contexts, including occupational health, , homeland security (toxic industrial chemicals), , and medicine (e.g., analysis of the breath) . In particular, there remains an unmet need for wearable sensors for human exposure measurements and health monitoring , and lightweight sensors for autonomous aerial vehicles. , Additionally, although metal oxide − and electrochemical amperometric − sensors possess limits of detection that make them potentially suitable for environmental monitoring, they are not approved for regulatory compliance testing by US regulatory agencies (the Environmental Protection Agency and the Occupational Safety and Health Administration) because they are not sufficiently stable or reliable. Liquid crystals (LCs), which combine key properties of crystalline solids (long-range order) and isotropic liquids (molecular mobility), are a promising class of chemoresponsive materials for designing wearable/portable sensors (e.g., badges for monitoring of exposure to toxic gases and assay read out using a smartphone).…”

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confidence: 99%

Sensing Gas Mixtures by Analyzing the Spatiotemporal Optical Responses of Liquid Crystals Using 3D Convolutional Neural Networks

et al. 2022

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We report how analysis of the spatial and temporal optical responses of liquid crystal (LC) films to targeted gases, when performed using a machine learning methodology, can advance the sensing of gas mixtures and provide important insights into the physical processes that underlie the sensor response. We develop the methodology using O3 and Cl2 mixtures (representative of an important class of analytes) and LCs supported on metal perchlorate-decorated surfaces as a model system. Although O3 and Cl2 both diffuse through LC films and undergo redox reactions with the supporting metal perchlorate surfaces to generate similar initial and final optical states of the LCs, we show that a three-dimensional convolutional neural network can extract feature information that is encoded in the spatiotemporal color patterns of the LCs to detect the presence of both O3 and Cl2 species in mixtures and to quantify their concentrations. Our analysis reveals that O3 detection is driven by the transition time over which the brightness of the LC changes, while Cl2 detection is driven by color fluctuations that develop late in the optical response of the LC. We also show that we can detect the presence of Cl2 even when the concentration of O3 is orders of magnitude greater than the Cl2 concentration. The proposed methodology is generalizable to a wide range of analytes, reactive surfaces, and LCs and has the potential to advance the design of portable LC monitoring devices (e.g., wearable devices) for analyzing gas mixtures using spatiotemporal color fluctuations.

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Improving the sensitive and selective of trace amount ozone sensor on Indium-Gallium-Zinc Oxide thin film by ultraviolet irradiation

Cited by 29 publications

References 46 publications

Realization of a Self-Powered InGaZnO MSM Ozone Sensor via a Surface State Modulated Photovoltaic Effect

Realization of a Self-Powered InGaZnO MSM Ozone Sensor via a Surface State Modulated Photovoltaic Effect

The Response of UV/Blue Light and Ozone Sensing Using Ag-TiO2 Planar Nanocomposite Thin Film

Sensing Gas Mixtures by Analyzing the Spatiotemporal Optical Responses of Liquid Crystals Using 3D Convolutional Neural Networks

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