Improving thin-film zinc-oxide surface acoustic wave device insertion loss using a grooved reflective grating structure

Huang, I‐Yu; Lin, Chang‐Yu; Lan, Je-Wei

doi:10.1117/1.jmm.12.1.013019

Cited by 5 publications

(4 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Since the displacement of RSAW in the y direction is zero [30] (as shown in Figure 1) and the length of IDTs is usually ten times longer than its width, the edge effect in IDTs can be ignored in the simulation. Thus, the 3D structure of a SAW device can be simplified as a 2D model [31]. Moreover, in general, the finger electrodes of IDTs are periodically arranged and alternatively biased by high and low voltages (in this paper, high voltage is 1 V and low voltage is 0 V), thus one period of the IDTs (see in Figure 2a) is sufficient to approximate the whole SAW resonator.…”

Section: The Simplified 2d Model For Eigenfrequency Analysismentioning

confidence: 99%

Modulating the Performance of the SAW Strain Sensor Based on Dual-Port Resonator Using FEM Simulation

Cheng

Yang

et al. 2023

Materials

View full text Add to dashboard Cite

Surface acoustic wave (SAW) strain sensors fabricated on piezoelectric substrates have attracted considerable attention due to their attractive features such as passive wireless sensing ability, simple signal processing, high sensitivity, compact size and robustness. To meet the needs of various functioning situations, it is desirable to identify the factors that affect the performance of the SAW devices. In this work, we perform a simulation study on Rayleigh surface acoustic wave (RSAW) based on a stacked Al/LiNbO3 system. A SAW strain sensor with a dual-port resonator was modeled using multiphysics finite element model (FEM) method. While FEM has been widely used for numerical calculations of SAW devices, most of the simulation works mainly focus on SAW modes, SAW propagation characteristics and electromechanical coupling coefficients. Herein, we propose a systematic scheme via analyzing the structural parameters of SAW resonators. Evolution of RSAW eigenfrequency, insertion loss (IL), quality factor (Q) and strain transfer rate with different structural parameters are elaborated by FEM simulations. Compared with the reported experimental results, the relative errors of RSAW eigenfrequency and IL are about 3% and 16.3%, respectively, and the absolute errors are 5.8 MHz and 1.63 dB (the corresponding Vout/Vin is only 6.6%). After structural optimization, the obtained resonator Q increases by 15%, IL decreases by 34.6% and the strain transfer rate increases by 2.4%. This work provides a systematic and reliable solution for the structural optimization of dual-port SAW resonators.

show abstract

Section: The Simplified 2d Model For Eigenfrequency Analysismentioning

confidence: 99%

Modulating the Performance of the SAW Strain Sensor Based on Dual-Port Resonator Using FEM Simulation

Cheng

Yang

et al. 2023

Materials

View full text Add to dashboard Cite

show abstract

“…Insertion loss (IL) is the attenuation of energy in the process of surface acoustic wave propagation, reflects the energy consumption of SAW device, [31] IL(dB) = 20 log(|V out /V in |), (5) where V in and V out are the voltages at the input and output IDT, respectively.…”

Section: Theoretical Detailsmentioning

confidence: 99%

Finite element simulation of Love wave sensor for the detection of volatile organic gases

Wang¹,

Liang²,

Shang³

et al. 2022

Chinese Phys. B

View full text Add to dashboard Cite

The 3D finite element (3D-FE) simulation and analysis of Love wave sensors based on PIB layers/SiO2/ST-90°X quartz structure, as well as the investigation of coupled resonance effect on the acoustic properties of the devices, are presented in this paper. The mass sensitivity of the basic Love wave device with SiO2 guiding layers solved analytically. And the highest mass sensitivity of 128 m2/kg is obtained as h s/λ =0.175. The sensitivity of the Love wave sensors for sensing VOCs is greatly improved due to the presence of coupled resonance induced by the PIB nanorods on the device surface. The frequency shifts of the sensor corresponding to CH2Cl2, CHCl3, CCl4, C2Cl4, CH3Cl and C2HCl3 with the concentration of 100 ppm are 1.431 kHz, 5.507 kHz, 13.437 kHz, 85.948 kHz, 0.127 kHz and 17.879 kHz, respectively. The viscoelasticity influence of sensitive material on the characteristics of SAW sensors is also studied. Taking account of the viscoelasticity of PIB layers, the sensitivities of SAW sensors with the PIB film and PIB nanorods decay in different degree. The gas sensing property of Love wave sensor with PIB nanorods is superior to that of the PIB films. Meanwhile, the Love wave sensors with PIB sensitive layers show good selectivity to C2Cl4, making it an ideal selection for gas sensing applications.

show abstract

“…The energy dissipation mechanism of micro-nano resonators can be divided into two aspects: intrinsic loss and extrinsic loss. Intrinsic losses are usually caused by the internal friction of materials, mainly including thermoelastic damping [22], surface losses [23], acoustic-thermal phonon interactions [24] (Akhiezer damping and Landau Rumer damping), and defect losses (impedance due to impurities, dislocations, vacancies and other defects) [25]. External losses usually refer to energy dissipation caused by non-ideal structural design and complex working environment, mainly including: support loss [26], electromagnetic loss [27] and viscous damping in non-vacuum environment [28].…”

Section: Introductionmentioning

confidence: 99%

“…The machined resonators have few defects, high Q values and high processing success rate. Many sources of frequency fluctuations have been theoretically described, including adsorption-desorption noise [23,25], temperature noise due to limited heat capacity [22], defect motion [25] or molecular diffusion noise along the resonators [23,28]. The frequency stability of the resonators measured in some literatures is on average 2.1 orders of magnitude higher than that of the thermomechanical noise limit [21,28].…”

Section: Introductionmentioning

confidence: 99%

Resonance characteristics and energy losses of an ultra-high frequency ZnO nanowire resonator

Cai¹,

Xu²

2022

Phys. Scr.

View full text Add to dashboard Cite

An ultra-high frequency (UHF, 300 MHz ~ 3 GHz) nano mechanical resonator based on defect-free zinc oxide nanowire (ZnO NW) was fabricated through a top-down processing method. Using UHF detection technology based on a lock-in amplifier, through optimized measurement of high-performance equipment, it was detected at room temperature that the ZnO NW resonator could operate at a resonance frequency of nearly 650 MHz and a quality factor Q≈1000~2500, and its force sensitivity could reach 1 f N·Hz-1/2. The deformation, driving force and first-order resonance frequency of the resonator were calculated using the continuum model and compared with the experimental data. The resonance characteristics of ZnO NW resonators under piezoelectric excitation were analyzed and compared with that under electromagnetic excitation. The effects of various loss factors on the resonance characteristics were analyzed, with emphasis on the generation mechanism of piezoelectric loss, clamping loss and eddy current loss and their effects on quality factor and force sensitivity. The ZnO NWs used in this paper have piezoelectric effect, which is rare in other NWs, and are difficult to be fabricated in a bottom-up manner. And experiments show that for ZnO NWs resonators, piezoelectric excitation has obvious advantages in Q value compared with electromagnetic excitation. Unlike the bottom-up wet etch processing method, the resonant beam structure is well protected by the top-down processing method to reduce internal defects, and the top-down fabrication method is easier to integrate into the fabrication process of integrated circuits, which provides great potential for the applications of NW resonators, such as quantum electromechanical systems and high-frequency signal processing.

show abstract

Improving thin-film zinc-oxide surface acoustic wave device insertion loss using a grooved reflective grating structure

Cited by 5 publications

References 0 publications

Modulating the Performance of the SAW Strain Sensor Based on Dual-Port Resonator Using FEM Simulation

Modulating the Performance of the SAW Strain Sensor Based on Dual-Port Resonator Using FEM Simulation

Finite element simulation of Love wave sensor for the detection of volatile organic gases

Resonance characteristics and energy losses of an ultra-high frequency ZnO nanowire resonator

Contact Info

Product

Resources

About