In- and out-plane transport properties of chemical vapor deposited TiO2 anatase films

Abstract

Due to their polymorphism, TiO2 films are quintessential components of state-of-the-art functional materials and devices for various applications from Dynamic Random Access Memory to Solar Water Splitting. However, contrary to other semiconductor/dielectric materials, the relationship between structural/morphological and electrical properties at the nano and micro scales remains unclear. In this context, the morphological characteristics of TiO2 films obtained by Metal-Organic Chemical Vapor Deposition (MOCVD) and Plasma Enhanced Chemical Vapor Deposition (PECVD), the latter including nitrogen doping, are investigated and they are linked to their in-plane and out-plane electrical properties. A transition from dense to tree-like columnar morphology is observed for the MOCVD films with increasing deposition temperature. It results in the decrease of grain size and the increase of porosity and disorder, and subsequently it leads to the decrease of lateral carrier mobility. The increase of nitrogen amount in the PECVD films enhances the disorder in their pillar-like columnar

Towards a Better Understanding of the Back-Side Illumination Mode on Photocatalytic Metal–Organic Chemical Vapour Deposition Coatings Used for Treating Wastewater Polluted by Pesticides

“…These observations are in agreement with the literature: it was previously reported that the deposition temperature (475 • C) is in the range that favours the columnar growth of the coating [59]. The grains seen in Figure 2a-e are, therefore, the heads of the columns.…”

Elaboration of Fe3O4/ZnO nanocomposite with highly performance photocatalytic activity for degradation methylene blue under visible light irradiation

“…Over the past years, researchers in the major of water treatment have focused on the improvement of nano materials which act as photocatalysts [16][17][18][19][20][21][22][23][24][25][26][27]. Several semiconductors such as SnO2, WO3,TiO2, CeO2, and ZnO have been utilized as heterogeneous photocatalysis [28,29].…”

Nanoscale dielectric properties of TiO2 in SiO2 nanocomposite deposited by hybrid PECVD method

“…Nanoscale electrical characterizations were carried out on a Bruker Multimode 8 setup using three different modes: Electrostatic Force Microscopy (EFM) for the dielectric permittivity [29,30], Kelvin Probe Force Microscopy (KPFM) for the charge injection and trapping dynamics [31] and the Conductive AFM (C-AFM) for the current flowing through the NC films [32]. Experimental setups are described in figure 1.…”