In plane laser-interferometric sensor

Langlotz, Enrico; Dontsov, Denis; Schott, Walter

doi:10.1117/12.2235860

SPIE Proceedings

2016

DOI: 10.1117/12.2235860

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In plane laser-interferometric sensor

Enrico Langlotz

Denis Dontsov

Walter Schott

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“…The topography of the surface derived from the position of the sample is traceably measured by embedded laser interferometers along the 𝑥-, 𝑦-and 𝑧-axes. [8] The traceability of the laser interferometers are analyzed according to the JJG 739-2005 (national standard in China).…”

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confidence: 99%

Nano-Traceability Study of a Cr Standard Grating Fabricated by Laser-Focused Atomic Deposition

Lei¹,

Li²,

Fan³

et al. 2014

Chinese Phys. Lett.

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A dimensional artifact is developed, which is a chromium (Cr) deposition grating fabricated by a laser-focused atomic deposition technique. The mean pitch of the grating is measured by using a metrological atomic force microscope with a large range, where a series of reference signs have been performed to locate the deposition area. Cosine error of the measurement result is analyzed and eliminated by the iterative angle calibration. The measurement result shows that the mean pitch of the grating is 212.66 ± 0.02 nm, which is very close to half of the standing laser wavelength (𝜆 = 425.55 nm). This means that the grating has traceability with high accuracy and can substitute the laser interference technology for instrument calibration. Moreover, using the Cr deposition grating as a nano standard can shorten the traceability chain and improve the practical application.

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mentioning

confidence: 99%

Nano-Traceability Study of a Cr Standard Grating Fabricated by Laser-Focused Atomic Deposition

Lei¹,

Li²,

Fan³

et al. 2014

Chinese Phys. Lett.

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show abstract

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In plane laser-interferometric sensor

Cited by 1 publication

References 5 publications

Nano-Traceability Study of a Cr Standard Grating Fabricated by Laser-Focused Atomic Deposition

Nano-Traceability Study of a Cr Standard Grating Fabricated by Laser-Focused Atomic Deposition

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