In-plane photonic transduction of silicon-on-insulator microcantilevers

Noh, Jihyun; Anderson, Ryan; Kim, Seung Hyun; Cárdenas, Jaime; Nordin, Gregory P.

doi:10.1364/oe.16.012114

Cited by 37 publications

(33 citation statements)

References 31 publications

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“…Therefore, techniques able to measure these displacements with subnanometer accuracy in bandwidths of 1 Hz are required. Main techniques for the readout of the nanomechanical response include the optical lever method, 13 interferometry-based methods, 14,15 integrated optical waveguides, 16,17 capacitive read-out, 18,19 and the use of piezoresistive cantilevers. [20][21][22][23] The optical lever is the most widespread method because of its simplicity, extreme sensitivity, and the capability for measuring in vacuum, air, gas mixtures, and liquids.…”

Section: Introductionmentioning

confidence: 99%

High throughput optical readout of dense arrays of nanomechanical systems for sensing applications

Martínez¹,

Kosaka²,

Tamayo³

et al. 2010

Review of Scientific Instruments

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A nano-cheese-cutter to directly measure interfacial adhesion of freestanding nano-fibers J. Appl. Phys. 111, 024315 (2012) Stabilization and growth of non-native nanocrystals at low and atmospheric pressures J. Chem. Phys. 136, 044703 (2012) Nanoparticle production in arc generated fireballs of granular silicon powder AIP Advances 2, 012126 (2012) Stability and topological transformations of liquid droplets on vapor-liquid-solid nanowires J. Appl. Phys. 111, 024302 (2012) Role of RuO3 for the formation of RuO2 nanorods Appl. Phys. Lett. 100, 033108 (2012) Additional information on Rev. Sci. Instrum. We present an instrument based on the scanning of a laser beam and the measurement of the reflected beam deflection that enables the readout of arrays of nanomechanical systems without limitation in the geometry of the sample, with high sensitivity and a spatial resolution of few micrometers. The measurement of nanoscale deformations on surfaces of cm 2 is performed automatically, with minimal need of user intervention for optical alignment. To exploit the capability of the instrument for high throughput biological and chemical sensing, we have designed and fabricated a two-dimensional array of 128 cantilevers. As a proof of concept, we measure the nanometer-scale bending of the 128 cantilevers, previously coated with a thin gold layer, induced by the adsorption and self-assembly on the gold surface of several self-assembled monolayers. The instrument is able to provide the static and dynamic responses of cantilevers with subnanometer resolution and at a rate of up to ten cantilevers per second. The instrumentation and the fabricated chip enable applications for the analysis of complex biological systems and for artificial olfaction.

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Section: Introductionmentioning

confidence: 99%

High throughput optical readout of dense arrays of nanomechanical systems for sensing applications

Martínez¹,

Kosaka²,

Tamayo³

et al. 2010

Review of Scientific Instruments

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“…As noted in Ref. 25, the larger ⌬ is, the greater the range one expects to see for the differential signal. Consequently, we expect microcantilevers 8 and 9 to show poor differential signal characteristics.…”

Section: Resultsmentioning

confidence: 69%

“…As discussed in Ref. 25, this inevitably results in little to no sensitivity near zero deflection where the slope of the captured power as a function of deflection is zero. As demonstrated in Ref.…”

Section: Designmentioning

confidence: 96%

“…As demonstrated in Ref. 25, our design eliminates this problem by employing an asymmetric, multimode receiver waveguide with two optical outputs with which a differential signal is formed that is a monotonic function of deflection. Figure 1͑a͒ shows a schematic of our microcantilever and receiver waveguide geometry, which is fabricated at the top silicon layer of a silicon-on-insulator ͑SOI͒ wafer.…”

Section: Designmentioning

confidence: 99%

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Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method

Anderson

Qian

et al. 2009

Review of Scientific Instruments

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We demonstrate a microcantilever array with an in-plane photonic transduction method for simultaneous readout of each microcantilever. The array is fabricated on a silicon-on-insulator substrate. Rib waveguides in conjunction with a compact waveguide splitter network comprised of trench-based splitters and trench-based bends route light from a single optical input to each microcantilever on the chip. Light propagates down a rib waveguide integrated into the microcantilever and, at the free end of the microcantilever, crosses a small gap. Light is captured in static asymmetric multimode waveguides that terminate in Y-branches, the outputs of which are imaged onto an InGaAs line scan camera. A differential signal for each microcantilever is simultaneously formed from the two outputs of the corresponding Y-branch. We demonstrate that reasonable signal uniformity is obtained with a scaled differential signal for seven out of nine surviving microcantilevers in an array.

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“…The deflection of the CL can be determined by means of bulky deflection of an optical beam [56] or electrical, i.e., capacitive, piezoresistive, or piezoelectric read-outs [43,54,55]. Alternatively, fully integrated optical read-out with a CL waveguide was firstly presented in 2006 by Zinoviev et al [138] and in the following three years by other groups [139][140][141][142]. In 2008, we proposed a novel integrated optical read-out of singly-clamped CL (sCL) bending with a grated-waveguide (GWG) optical cavity and presented preliminary simulation results [109].…”

Section: Introductionmentioning

confidence: 99%

Integrated optical sensor utilizing slow-light propagation in grated-waveguide cavities

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In-plane photonic transduction of silicon-on-insulator microcantilevers

Cited by 37 publications

References 31 publications

High throughput optical readout of dense arrays of nanomechanical systems for sensing applications

High throughput optical readout of dense arrays of nanomechanical systems for sensing applications

Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method

Integrated optical sensor utilizing slow-light propagation in grated-waveguide cavities

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