In-situ and elementally resolved determination of the thickness uniformity of multi-ply films by confocal micro XRF

Glancing incidence x-ray fluorescence spectrometry based on a single-bounce parabolic capillary

“…X-ray fluorescence (XRF) spectrometry is an established analytical tool for detecting trace amounts of material on a micrometer depth scale. [1,2] It has been applied in several research fields, such as chemical analysis, [3] mineral analysis, [4] archaeometry, [5] medicine, [6] jewelry identification [7] and environmental sciences. [8,9] In conventional XRF spectrometry, the angle of incidence of the primary x-ray beam is usually set to around 45 • to study the properties of relatively deep regions of the sample.…”