In-situ annealing effect of sputter-deposited Nd1Ba2Cu3O7−δ thin films

Nbco Micro Bridge Junctions Fabricated by Excimer Laser Patterning

“…Sputtering parameters and the in-situ annealing process were determined by preliminary experiments and the results have been reported elsewhere. 6,7 In-situ annealing after each deposition was performed at 600 • C for 1 hour followed by gradually cooling from 600 • C to 300 • C for 240 minutes in 300 Torr oxygen atmosphere. It is known that the oxygen content is in proportion with the carrier concentration in this system.…”

Micropatterning of NdBa2Cu3O thin films using a KrF excimer laser

“…NBCO thin films on MgO (100) single-crystal substrates were prepared by dc magnetron sputtering using a single composite oxide target. Sputtering parameters and the in situ annealing 0953-2048/01/010045+05$30.00 © 2001 IOP Publishing Ltd Printed in the UK process were determined by preliminary experiments and the results are reported elsewhere [8,9]. In situ annealing after each deposition was performed at 600 • C for 1 h followed by gradual cooling from 600 to 300 • C for 240 min in a 300 Torr oxygen atmosphere.…”

“…NdBa 2 Cu 3 O (NBCO) is known to have the highest zero-resistivity temperature (T c ) in the related ReBa 2 Cu 3 O system and is a good candidate material for use in thin-film device applications. Highly c-axis oriented and single phase NBCO thin films have been obtained [8,9]. However, experimental results of the laser etching process of high-temperature superconductors have mainly been reported regarding microbridges of YBa 2 Cu 3 O (YBCO) films.…”