In-situ compensation of the parasitic capacitance for nanoscale hysteresis measurements

Schmitz, Torsten; Prume, K.; Reichenberg, B.; Roelofs, Andreas; Waser, Rainer; Tiedke, S.

doi:10.1016/s0955-2219(03)00583-1

Cited by 21 publications

(14 citation statements)

References 5 publications

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“…For submicron size ferroelectric capacitors, the capacitance is usually one or two orders of Technol (2012) 18:531-535 533 magnitude lower than the parasitic capacitance of the whole set-up including the probe. And thus it will cause very high polarization values in the saturation regime (Schmitza et al 2004). Furthermore, for nano-scale capacitors, significant displacement of 90°domains during the application of the electric field would lead to the increase of the remanent polarization (Alexe and Gruverman 2004), which is consistent with our measurement results.…”

Section: Resultssupporting

confidence: 88%

Fabrication of PZT nano dot array and their ferroelectric properties

Zhao

Wang

et al. 2012

Microsyst Technol

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This paper demonstrates a promising and low-cost method for fabricating PZT nano-dot array by using sol-gel template method combined with laser interference lithography. ZrO 2 template with the pitch of 1 lm is firstly fabricated by sol-gel method and laser interference with a 325 nm He-Cd laser. Afterwards, PZT nano dot array with diameter of 500 nm and thickness of 20 nm is prepared on the ZrO 2 template. Atomic force microscope results show that the PZT nano dot array is uniform and highly ordered. Ferroelectric properties of PZT nano dot array are in situ measured through online-operation of TF analyzer and AFM. A ferroelectric hysteresis loop is obtained for the PZT nano dot.

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Section: Resultssupporting

confidence: 88%

Fabrication of PZT nano dot array and their ferroelectric properties

Zhao

Wang

et al. 2012

Microsyst Technol

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“…Owing to the influence of the parasitic capacitance, the tested remanent polarization and coercive field can increase remarkably, and with a reduction in the sizes of cells, this kind of phenomena will become more remarkable. This is in agreement with research results that "the parasitic capacitance should be one to two orders larger than capacitor of cells" obtained by Schmitz et al [9] ; and the existence of leakage current can also enlarge the testing results. Alexe et al [10] held that the effect of leakage current upon the remanent polarization and coercive field in saturated state should be of the same extent as the effect of parasitic capacitance upon the testing results, which can also render the testing results to increase remarkably.…”

Section: Ferroelectric Performances Of Array Dots Of Pzt Filmssupporting

confidence: 93%

Fabrication of sub-micro size PZT array and their ferroelectric properties

Zhao

Zhang

et al. 2006

SCI CHINA SER E

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The photosensitive PZT sols and their gel films were prepared by sol-gel process. Based on the photosensitivity of the PZT gel films, two-dimensional (2D) array of the PZT gel film was fabricated using twice-exposure of double-beam interference on the gel film. PZT gel films coated on ITO/quartz substrate were exposed to an interference fringe of 325 He-Cd laser beams, the substrate was rotated by 90° between the first and second irradiation steps. Island type periodic 2D array structures with a pitch of 1 μm and cell size of about 480 nm × 480 nm × 40 nm were formed after the irradiation, and followed by leaching with organic solvent, and then by heat treatment at 600℃ for 15 min. The hysteresis loops of the cell in PZT array were in-situ measured by the online-operation of TF analyzer and atomic force microscope (AFM). The probe can be located on the locked cell of PZT array in the AFM image. The alternating voltage applied to the locked cell is supplied by the TF analyzer through the conductive coating probe, and then the test signal is fed back to the TF analyzer to obtain the hysteresis loop of the locked cell of array in the absence of top electrode. The results show that the sub-micro size PZT arrays prepared in this way are of polarization reversal characteristics with the alternating electric fields, thereby exhibiting obvious ferroelectricity.

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“…8,9 As the switching charge to detect drops below the background noise for ever shrinking structure dimensions, the smallest capacitors ever electrically characterized were 200ϫ 200 nm 2 . 10,11 In order to enable electrical characterization on nanoscale ferroelectric capacitors and to set a step toward further integration, our group recently presented self-assembled lead titanate ͓PbTiO 3 ͑PTO͔͒ nanograins embedded in a layer of low-k dielectric spin-on glass ͑SOG͒ and equipped with collective gold top electrodes. 12 Electrical access to the grain tops was provided using a dedicated chemical mechanical polishing ͑CMP͒ step.…”

Section: Introductionmentioning

confidence: 99%

Direct electrical characterization of embedded ferroelectric lead titanate nanoislands

Clemens

Dippel

Schneller

et al. 2008

Journal of Applied Physics

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We report on the fabrication and characterization of lead titanate nanoislands on platinized silicon substrates embedded into a low-k dielectric. Our findings with Pt and Au as collective top electrodes are compared to previous results and thin films, and we discuss the coercive field and the remanent polarization with special care devoted to capacitive and leakage contributions of the nonpolar matrix. A direct electrical characterization of sub-100-nm ferroelectric nanoislands becomes feasible if they are measured in parallel, providing that the thin film material parameters of both ferroelectric and spin-on glass are independently determined.

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In-situ compensation of the parasitic capacitance for nanoscale hysteresis measurements

Cited by 21 publications

References 5 publications

Fabrication of PZT nano dot array and their ferroelectric properties

Fabrication of PZT nano dot array and their ferroelectric properties

Fabrication of sub-micro size PZT array and their ferroelectric properties

Direct electrical characterization of embedded ferroelectric lead titanate nanoislands

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