2006
DOI: 10.1380/ejssnt.2006.319
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In situ differential reflectance spectroscopy study of solid phase epitaxy in Si(111)-Fe and Si(111)-Cr systems

Abstract: The results of investigations devoted to a search of conditions of the simultaneous metal and semiconductor silicides formation being important problem for microelectronics are presented in the paper. The Si(111)-Fe and Si(111)-Cr systems having been chosen due to low lattice misfit of silicides observed in they were studied by the methods of Differential Reflection Spectroscopy (DRS) and Atomic Force Microscopy (AFM). The new method (Restored Standard method) having been invented for DRS studying of solid pha… Show more

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Cited by 7 publications
(6 citation statements)
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“…The unit cell consists of 6 formula units, in which Ca and Si atoms are grouped into four inequivalent sites. The formation a Ca 3 Si 4 film has been observed the first time at Ca deposition onto at 500°C Si(111)7x7 substrate with formation of indirect band gap of 0.63 eV [5], close to value predicted by ab initio calculation [6]. Thick semiconducting Ca 3 Si 4 films with Si cap layer were not grown earlier on silicon substrate.…”
Section: Introductionsupporting
confidence: 78%
“…The unit cell consists of 6 formula units, in which Ca and Si atoms are grouped into four inequivalent sites. The formation a Ca 3 Si 4 film has been observed the first time at Ca deposition onto at 500°C Si(111)7x7 substrate with formation of indirect band gap of 0.63 eV [5], close to value predicted by ab initio calculation [6]. Thick semiconducting Ca 3 Si 4 films with Si cap layer were not grown earlier on silicon substrate.…”
Section: Introductionsupporting
confidence: 78%
“…However, CIPDF of the last stage (spectrum IV in Fig. 7(b) in [3]) is close to that of the 3rd one in Fig. 3(b).…”
Section: Resultssupporting
confidence: 57%
“…The DRS technique has been described in [3]. The experimental value obtained either during DRS study or after the experiments have been finished is differential reflection coefficient (DRC)…”
Section: Methodsmentioning
confidence: 99%
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“…It has been established that the formation of nanosize semiconductor islands of semiconductor metal's silicides and stannide leads to peak's formation in the spectra of the change of the imaginary part of dielectric function (CIPDF) in the photon energy range 1.1-1.7 eV [6], which is associated with the formation of the interband transitions with great oscillator force. In case of island formation of metallic silicides a monotonic decrease of CIPDF with increasing photon photons is observed.…”
mentioning
confidence: 99%