and YAG) are fabricated. Fine Y 2 O 3 acts as transient liquid phase promoting additive, and reacts with Al 2 O 3 phase (from feedstock mixture and on AlN particles surface) to create wetting agent of yttrium aluminate Y-Al-O around solid AlN particles. However, due to rapid solidification rates of plasma, it is difficult to react with the interspersed oxygen in AlN grains. The Y 2 O 3 addition significantly reduces the coatings oxide content due to the consumption of starting Al 2 O 3 to form the YAG. Influence of Y 2 O 3 significantly observes with increasing AlN feedstock and high AlN content coatings with small oxides are fabricated by RPS of 80AlN-10Al 2 O 3 -10Y 2 O 3 mixture. Thermal conductivity is improved with using Y 2 O 3 and increasing AlN feedstock. However, the conductivity is not so high compared to the AlN compacts, due to increased porosity, incomplete sintering of the formed initial liquid phase state, remaining oxide content, and low density of the coatings.