In situ measurement and error compensation of monolithic multisurface optics

Xiong, Yupeng; Luo, Tiancong; Dai, Yifan; Chen, Shanyong; Tie, Guipeng

doi:10.1016/j.optcom.2020.126665

Cited by 6 publications

(1 citation statement)

References 13 publications

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“…At the same time, the environment of off-position measurement is generally different from the machining environment, which may easily cause the measurement results to not accurately guide the compensation machining. The third method is to use the method of in situ measurement [ 2 , 3 , 4 ] and compensation machining [ 5 , 6 ] to improve the accuracy of the surface shape. This method not only reduces the requirements on the performance of the machine tool but also avoids the impact of the secondary clamping error and environmental changes.…”

Section: Introductionmentioning

confidence: 99%

In Situ Measurement and Reconstruction Technology of Cylindrical Shape of High-Precision Mandrel

Sun

Dai

et al. 2023

Micromachines

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The technology of in situ measurement of cylindrical shapes is an important means of improving the surface machining accuracy of cylindrical workpieces. As a method of cylindricity measurement, the principle of the three-point method has not been fully studied and applied, so it is seldom used in the field of high-precision cylindrical topography measurement. Since the three-point method has the advantages of a simpler measurement structure and smaller system error compared with other multi-point methods, the research on it is still of great significance. Based on the existing research results of the three-point method, this paper proposes the in situ measurement and reconstruction technology of the cylindrical shape of a high-precision mandrel by means of a three-point method. The principle of the technology is deduced in detail and an in situ measurement and reconstruction system is built to carry out the experiments. Experiment results are verified using a commercial roundness meter and the deviation of cylindricity measurement results is 10 nm, which is 2.56% of the measurement results of commercial roundness meters. This paper also discusses the advantages and application prospects of the proposed technology.

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