We have developed a growth process that leads to the direct formation of self-assembled InAs quantum dots on InP͑001͒ by solid-source molecular beam epitaxy avoiding the previous formation of quantum wires usually obtained by this technique. The process consists of a periodically alternated deposition of In and As correlated with InAs͑4 ϫ 2͒ ↔ ͑2 ϫ 4͒ surface reconstruction changes. Based on the results obtained by in situ characterization techniques, we propose that the quantum dots formation is possible due to the nucleation of In droplets over the InAs͑4 ϫ 2͒ surface during the In deposition step and their subsequent crystallization under the As step. © 2009 American Institute of Physics. ͓DOI: 10.1063/1.3108087͔ Semiconductor self-assembled quantum dots ͑QDs͒ have received much attention because of their application in advanced optical devices. 1,2 In particular, the active elements based on the InAs/InP heteroepitaxial system are interesting for their use in laser devices emitting at 1.55 m, compatible with optical fiber communications. 3 The self-assembling of QDs is a strain-driven process that takes place in highly lattice-mismatched semiconductor materials. The strained material grows in a layer-by-layer mode up to a certain critical thickness and then the growth mode switches from two dimensional ͑2D͒ to three dimensional ͑3D͒ with the net result of elastic energy relaxation ͑Stranski-Krastanov process͒. The InAs/GaAs heteroepitaxial system is a well studied example of this kind of process. 4 However, in the InAs/ InP͑001͒ heteroepitaxial system growing under usual molecular beam epitaxy ͑MBE͒ conditions, quantum wires ͑QWRs͒ elongated along the ͓110͔ direction are formed instead of QDs, which are in principle more efficient for elastic energy relaxation. Other authors have recently recognized the key role of the InAs As-rich ͑2 ϫ 4͒ surface reconstruction in a growth model for QWR formation. 5 Other works report the InAs/InP͑001͒ QD formation using MBE but always through the evolution of previously formed QWRs: either by the ripening of the initial QWRs during substrate cooling down under arsenic overpressure 6 or after substrate annealing under no arsenic flux at the InAs͑4 ϫ 2͒ surface reconstruction. 7 In a previous model we proposed that the growth of InAs on InP under a ͑2 ϫ 4͒ V element ended surface reconstruction produces a stress asymmetry at the InAs/InP interface, inducing an asymmetric relaxation process that finally results in QWR formation. 8,9 According to our previous model, the built-in interface strain anisotropy could be inhibited if the surface would be terminated in III element. 9 Therefore, if those conditions could be experimentally achieved, for example, growing InAs on the In-rich ͑4 ϫ 2͒ surface reconstruction, QDs instead of QWRs would be directly obtained in the InAs/InP͑001͒ system.In this work we have developed a method to implement this idea. The method consists of depositing InAs in a pulsed mode under experimental conditions in which the surface shows most of the growt...