In-situ nanoindentation in the SEM

Nowak, Jessica; Rzepiejewska-Malyska, Karolina; Major, Ryan C.; Warren, Oden L.; Michler, Johann

doi:10.1016/s1369-7021(10)70144-9

Cited by 34 publications

(18 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Such adjustments include the calibration of area function on some polymer samples with known elastic modulus such as polycarbonate (PC) [24] or polystyrene (PS) [10]; the use of high loading and unloading rates [7,8] as well as indentation holding times [25,26] to minimize the effect of ACCEPTED MANUSCRIPT ACCEPTED MANUSCRIPT 6 viscoelasticity; and the introduction of phenomenological correction factors [10]. More recently, some researchers take advantage of AFM [27,28] or scanning electron microscope (SEM) [29] to directly measure the indenter geometry instead of using calibration procedures. There are also a few works performing immediate measurement of the contact area in order to possibly take into account the pile-up effect [30,31].…”

Section: Introductionmentioning

confidence: 99%

Indenter geometrical effects on sub-micro/nano indentation and scratch behaviors of polymeric surfaces

Wang

Zhang

et al. 2015

Mechanics of Advanced Materials and Structures

View full text Add to dashboard Cite

In this work we study the indenter geometrical effects on the nanoindentation and scratch behaviors of polymers (epoxy resin and its based nanocomposites) through both experimental and numerical approaches. Two different types of indenter commonly used in nanoindentation tests, Berkovich (i.e. three-sided pyramid-shaped) and conical-shaped, are studied. An indenter (tip) geometry reconstruction procedure is presented and the results are input into finite element models to better understand the mechanisms of the geometrical effects on nanoindentation. Originally, the effect of indenter geometry on nanoscratch behavior is also investigated experimentally. Overall, our results show that the corrected Oliver and Pharr's method is applicable to nanoindentation of polymeric surfaces and the indenter geometry plays significant roles in both the nanoindentation and nanoscratch tests. The conical-shaped indenter provides slightly overestimated mechanical parameters for the polymers tested due to the material pile-up. Therefore, for nanoindentation and scratch tests, the type of indenter should always be mentioned and comparisons between tests using different types of indenter should be taken with caution.

show abstract

Section: Introductionmentioning

confidence: 99%

Indenter geometrical effects on sub-micro/nano indentation and scratch behaviors of polymeric surfaces

Wang

Zhang

et al. 2015

Mechanics of Advanced Materials and Structures

View full text Add to dashboard Cite

show abstract

“…[22][23][24][25][26][27][28][29][30][31][32][33][34][35][36][37] Even the first commercial solutions emerge for both SEM and TEM, mainly employing a patented three plate capacitor design for applying forces and measuring displacements at the same time. 7,19,38,39 MEMS technology integrated into electron microscopes currently offers the best force and displacement resolution. However, the routine application is not yet possible.…”

Section: Introductionmentioning

confidence: 99%

A novel apparatus for in situ compression of submicron structures and particles in a high resolution SEM

Romeis

Paul

Ziener

et al. 2012

Review of Scientific Instruments

View full text Add to dashboard Cite

We report on the development and characterization of a novel in situ manipulation device to perform stressing experiments on the submicron scale inside a high resolution field emission scanning electron microscope. The instrument comprises two main assembly groups: an upper part for positioning and moving a mounted probe and a force sensor as well as a specimen support as lower part. The upper part consists of a closed loop tripod piezoelectric scanner mounted on a self-locking coarse positioning stage. Two interlocked steel springs and a linear variable differential transformer measuring the springs’ deflections compose the lower part of the instrument. This arrangement acts as force-sensor and sample support. In comparison to already well-established concepts a wide measuring range is covered by adjusting the spring constant between 30 N/m and 50000 N/m. Moreover, the new device offers striking advantages with respect to force calibration and sample deformation measurements. Force calibration is performed using the eigenfrequency of the force detection system directly inside the SEM. Deformation data are obtained with high accuracy by simultaneously recording displacements above and below the specimen. The detrimental apparatus compliance is determined, and the influence on measured data subsequently minimized: an easy to validate two-springs-in-series model is used for data correction. A force resolution in normal direction of 100 nN accompanied by a sample deformation resolution of 5 nm can be achieved with the instrument using an appropriate load cell stiffness. The capabilities and versatility of this instrument are exemplified by compression experiments performed on submicron amorphous silica particles.

show abstract

“…Design of a nanoindentation device which can be compatible with the SEM has a few challenges, 17 such as small volume of the SEM chamber, short working distance, electromagnetic compatibility, vacuum environment and vibration compatibility. So up to now, there are few papers a Author to whom correspondence should be addressed.…”

Section: Introductionmentioning

confidence: 99%

“…The significance of miniaturization indentation devices is emphasized in literatures again. 17,[22][23][24] In this paper, a novel in situ nanoindentation device with dimensions of 103mm×74mm×60mm is developed and it is compatible with the SEM-Quanta 250. Integrating the stepper motor, the piezoelectric actuator and the flexure hinge, the coarse positioner and the precision driven unit were designed respectively, which can be used to realize coarse adjustment of the specimen and precision loading and unloading process of the indenter.…”

Section: Introductionmentioning

confidence: 99%

A novel and compact nanoindentation device for in situ nanoindentation tests inside the scanning electron microscope

Huang

Zhao

et al. 2012

AIP Advances

View full text Add to dashboard Cite

In situ nanomechanical tests provide a unique insight into mechanical behaviors of materials, such as fracture onset and crack propagation, shear band formation and so on. This paper presents a novel in situ nanoindentation device with dimensions of 103mm×74mm×60mm. Integrating the stepper motor, the piezoelectric actuator and the flexure hinge, the device can realize coarse adjustment of the specimen and precision loading and unloading of the indenter automatically. A novel indenter holder was designed to guarantee that the indenter penetrates into and withdraws from the specimen surface vertically. Closed-loop control of the indentation process was established to solve the problem of nonlinearity of the piezoelectric actuator and to enrich the loading modes. The in situ indentation test of Indium Phosphide (InP) inside the scanning electron microscope (SEM) was carried out and the experimental result indicates the feasibility of the developed device

show abstract

In-situ nanoindentation in the SEM

Cited by 34 publications

References 7 publications

Indenter geometrical effects on sub-micro/nano indentation and scratch behaviors of polymeric surfaces

Indenter geometrical effects on sub-micro/nano indentation and scratch behaviors of polymeric surfaces

A novel apparatus for in situ compression of submicron structures and particles in a high resolution SEM

A novel and compact nanoindentation device for in situ nanoindentation tests inside the scanning electron microscope

Contact Info

Product

Resources

About