Conditioning of a metal surface in a high-voltage system is the progressive development of resistance to vacuum arcing over the operational life of the system. This is relevant for accelerator cavities, where high level of performance is only achievable after a long conditioning period. Beyond the accelerator research field, this is an important topic for any technology where breakdowns can cause device failure, either by directly disrupting device operation or by causing cumulative hardware damage.We are developing a direct method to measure the surface resistivity of a metal surface that is being conditioned with a HV DC system by inducing a high frequency (GHz) radio-frequency current in the parallel-plate electrode system. If the system can function as a resonant cavity, the surface resistivity data would be encoded in its quality factor (Q-factor). The changes in the resistivity measured in cryogenic conditions would indicate a formation of dislocations under the surface, something that has been speculated as an important process behind the conditioning.In this paper, we present two modified designs of the electrode system, which will act as a resonant cavity, the results of 3D EM simulations and experimental results regarding the characterization of this resonant system.