In situ synthesized carbon nanotube networks on a microcantilever for sensitive detection of explosive vapors

Ruan, Wenzhou; Li, Yuanchao; Tan, Zhimin; Liu, Litian; Jiang, Kaili; Wang, Zheyao

doi:10.1016/j.snb.2012.10.026

Cited by 30 publications

(21 citation statements)

References 46 publications

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“…Integrating a heater element can influence the detection technique and piezoresistance properties. For instance, the sensor reported for detection of TNT vapors in [ 113 ] uses the heat generated by the in-built heater resistor for deflagration of TNT vapors, resulting in enhanced heat generation and thereby cantilever bending. The resultant cantilever bending due to the heat generated by deflagration of TNT vapors is gauged by the piezoresistor.…”

Section: Theory Of Surface Stressmentioning

confidence: 99%

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Mathew

Sankar

2018

Nano-Micro Lett.

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In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.

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Section: Theory Of Surface Stressmentioning

confidence: 99%

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Mathew

Sankar

2018

Nano-Micro Lett.

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“…Microcantilevers have been widely studied as chemical and biological sensors [ 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 ] in which static bending induced by differential surface stress or changes in resonant frequency upon mass uptake is monitored [ 4 , 5 , 6 , 7 ]. A large body of literature exists on various types of microcantilever or N/MEMS (nano sensors used for chemical and explosives sensing) [ 8 , 9 , 10 , 11 ]. In addition, it has been reported that the sensitivity and selectivity of microcantilevers to specific explosive vapors can be enhanced through surface functionalization using nano-structured materials [ 12 , 13 , 14 ].…”

Section: Introductionmentioning

confidence: 99%

Numerical Modeling and Experimental Validation by Calorimetric Detection of Energetic Materials Using Thermal Bimorph Microcantilever Array: A Case Study on Sensing Vapors of Volatile Organic Compounds (VOCs)

Kang

Fragala²,

Banerjee

2015

Sensors

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Bi-layer (Au-Si3N4) microcantilevers fabricated in an array were used to detect vapors of energetic materials such as explosives under ambient conditions. The changes in the bending response of each thermal bimorph (i.e., microcantilever) with changes in actuation currents were experimentally monitored by measuring the angle of the reflected ray from a laser source used to illuminate the gold nanocoating on the surface of silicon nitride microcantilevers in the absence and presence of a designated combustible species. Experiments were performed to determine the signature response of this nano-calorimeter platform for each explosive material considered for this study. Numerical modeling was performed to predict the bending response of the microcantilevers for various explosive materials, species concentrations, and actuation currents. The experimental validation of the numerical predictions demonstrated that in the presence of different explosive or combustible materials, the microcantilevers exhibited unique trends in their bending responses with increasing values of the actuation current.

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“…However, the small active area of these sensors limits their sensitivity. In order to improve the sensitivity, the cantilever surface can be nanostructured with TiO 2 nanotubes or nanorods [17,18], ZnO nanorods or nanotubes [19][20][21], carbon nanotubes [22,23], mesoporous silica [24,25]. The surface can also be nanostructured with nanowires arrays [26,27].…”

Section: Introductionmentioning

confidence: 99%

Detection of Organophosphorous Chemical Agents with CuO-Nanorod-Modified Microcantilevers

Schlur

Agostini

Thomas

et al. 2020

Sensors

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Microcantilevers are really promising sensitive sensors despite their small surface. In order to increase this surface and consequently their sensitivity, we nanostructured them with copper oxide (CuO) nanorods. The synthesis of the nanostructure consists of the oxidation of a copper layer deposited beforehand on the surface of the sample. The oxidation is performed in an alkaline solution containing a mixture of Na(OH) and (NH4)2S2O8. The synthesis procedure was first optimized on a silicon wafer, then transferred to optical cantilever-based sensors. This transfer requires specific synthesis modifications in order to cover all the cantilever with nanorods. A masking procedure was specially developed and the copper layer deposition was also optimized. These nanostructured cantilevers were engineered in order to detect vapors of organophosphorous chemical warfare agents (CWA). The nanostructured microcantilevers were exposed to various concentration of dimethyl methylphosphonate (DMMP) which is a well-known simulant of sarin (GB). The detection measurements showed that copper oxide is able to detect DMMP via hydrogen interactions. The results showed also that the increase of the microcantilever surface with the nanostructures improves the sensors efficiency. The evolution of the detection performances of the CuO nanostructured cantilevers with the DMMP concentration was also evaluated.

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In situ synthesized carbon nanotube networks on a microcantilever for sensitive detection of explosive vapors

Cited by 30 publications

References 46 publications

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Numerical Modeling and Experimental Validation by Calorimetric Detection of Energetic Materials Using Thermal Bimorph Microcantilever Array: A Case Study on Sensing Vapors of Volatile Organic Compounds (VOCs)

Detection of Organophosphorous Chemical Agents with CuO-Nanorod-Modified Microcantilevers

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