The nanometric machining of Cu/Ag bilayers and pure Cu film is performed using molecular dynamics (MD) simulations. The mechanical and tribological properties of Cu/Ag bilayers are investigated by comparing with those of pure Cu film. The effects of machining parameters (indenter radius, tool speed and machining depth) on the subsurface damage and material removal are studied by analyzing the dislocation movement, chipping volume, machining force and average temperature of the workpiece.The results show that the hardness of Cu/Ag bilayers is smaller than that of pure Cu film, due to the dislocation nucleation and emission from the Cu/Ag interface. Meanwhile, the friction coefficient of Cu/ Ag bilayers is larger than that of pure Cu film. Furthermore, the metal bonding energy at the Cu/Ag interface is weaker than that in pure Cu film, which causes the low hardness in the Cu/Ag bilayers. The Young's moduli in the Cu/Ag bilayers and pure Cu film are calculated by the Hertz contact mechanism and are close to the experimental result. During nanometric machining of Cu/Ag bilayers, the larger indenter radius or higher tool speed would cause a larger indentation force. The chipping volume, machining force and average temperature would increase with the increment of indenter radius, tool speed and machining depth. The subsurface damage can be reduced by selecting the smaller indenter radius, lower tool speed, and smaller machining depth, where fewer lattice defects are produced. In addition, the selection of lower tool speed also plays a crucial role in improving the smoothness of the ground surface.