In-situ Versatile Characterization of Carbon NanoTubes using Nanorobotics

Clevy, Cédric; Sauvet, Bruno; Rauch, Jean-Yves; Lehmann, Olivier; Marionnet, F.; Lutz, Philippe; Beccacece, Lorenzo; Xavier, Stéphane; Aubry, R.; Ziaei, A.; Prévôt, C; Laurent, Guillaume J.

doi:10.1109/marss.2019.8860970

Cited by 5 publications

(3 citation statements)

References 15 publications

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“…In recent years, the utilization of robotics within the Scanning Electron Microscope (SEM) environment has garnered significant interest due to its diverse and promising applications in various fields, including nano-electronics, instrumentation, and materials research [1][2][3]. The ability to perform a sequence of tasks, ranging from sample preparation, separation, and manipulation, to multimodal characterization, under the SEM presents a multitude of opportunities for scientific advancements and technological innovations.…”

Section: Introductionmentioning

confidence: 99%

In-situ SEM Microrobotics for Versatile Force/Deformation Characterization: Application to Third-Body MoS2 Wear Particles

Hannouch,

Reynaud,

Colas

et al. 2024

Preprint

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Purpose: This article explores the challenges and solutions in the physical characterization of materials at the microscale using robots, with a specific focus on manipulating and characterizing micrometer-sized particles with different and complex 3D shapes and internal sub-micrometer structures. Particles considered as case-study in this paper are made of Molybdenum diSulfide (MoS2) based materials generated within the contact interface during friction. These particles are of high interest for friction reduction and energy saving, but they are dispersed randomly inside the contact and have complex sub-micrometer structures. Methods: Characterization demands precise manipulation techniques in an in-situ Scanning Electron Microscope(SEM) environment. To address these challenges, existing commercial micro and nanomanipulation tools are integrated within a vacuum SEM chamber, and robotics strategies are investigated to enable the whole process from particle preparation, and manipulation setup definition, to effective MoS2 particle characterization all in-situ SEM. Results: A set of several complementary experimental investigations are done and involve force measurement and deformation estimation studies, leading to the first qualitative results on MoS2 based particles directly from the friction track. The work contributes to advancements in both microscale manipulation and characterization. It also has implications for lubrication research.

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Section: Introductionmentioning

confidence: 99%

In-situ SEM Microrobotics for Versatile Force/Deformation Characterization: Application to Third-Body MoS2 Wear Particles

Hannouch,

Reynaud,

Colas

et al. 2024

Preprint

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“…A S a considerable amount of natural or artificially manufactured tiny objects such as cells, natural fibers [1], carbon nanotubes [2], and optical fibers have been increasingly used in recent decades for scientific, industrial and medical applications [3]- [11], a strong need for characterization systems and methods to manipulate at very small dimensional scales has arisen. Some commercial systems, such as the Atomic Force Microscope (AFM) have allowed significant advances in this regard [12], [13].…”

Section: Introductionmentioning

confidence: 99%

Large-Workspace Polyarticulated Micro-Structures Based-On Folded Silica for Tethered Nanorobotics

Lei¹,

Clevy²,

Rauch³

et al. 2022

IEEE Robot. Autom. Lett.

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Origami structures have a wide range of applications in robotics and have been intensively investigated by researchers in recent years. However, enabling sub-millimeter structures is an open question especially because of the lack of small enough joints. In this paper, compliant joints made of Silica by Focused Ion Beam (FIB) folding are proposed to achieve continuous, highly repeatable large motions. A polyarticulated structure including 3 joints is especially studied following a series of robotic analyses and experimentations to quantify the performances. The size of the structure firstly appears disruptive because smaller than 50 µm in typical overall length, i.e. less than the radius of an optical fiber. Secondly, the structure can achieve a planar workspace of 57 µm squared, which is significantly large compared to the structure dimension. Thirdly, repetitive movements performed at randomly selected positions, demonstrate an excellent repeatability standard deviations of 227 nm and 216 nm in x and y directions, respectively. These results together state the interest of novel polyarticulated structures resulting from the FIB folding as a basis for the next tethered nanorobotics generation.

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“…The requirement for a precise study of the micro world is continuously growing with emerging applications in almost every domain. The manipulation of sub-millimetric size components is notably required in various industrial and scientific applications such as miniature mechanical components [ 1 ], optical systems [ 2 , 3 ] assembly, the study of cells (in vivo or in vitro) [ 4 , 5 ], and ultra-small manufactured objects [ 6 , 7 ].…”

Section: Introductionmentioning

confidence: 99%

A Two-Axis Piezoresistive Force Sensing Tool for Microgripping

Tiwari

Billot

Clevy

et al. 2021

Sensors

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Force sensing has always been an important necessity in making decisions for manipulation. It becomes more appealing in the micro-scale context, especially where the surface forces become predominant. In addition, the deformations happening at the very local level are often coupled, and therefore providing multi-axis force sensing capabilities to microgripper becomes an important necessity. The manufacturing of a multi-axis instrumented microgripper comprises several levels of complexity, especially when it comes to the single wafer fabrication of a sensing and actuation mechanism. To address these requirements, in this work, an instrumented two-axis force sensing tool is proposed, which can then be integrated with the appropriate actuators for microgripping. Indeed, based on the task, the gripper design and shape requirements may differ. To cover wide needs, a versatile manufacturing strategy comprising of the separate fabrication of the passive and sensing parts was especially investigated. At the microscale, signal processing brings additional challenges, especially when we are dealing with multi-axis sensing. Therefore, a proper device, with efficient and appropriate systems and signal processing integration, is highly important. To keep these requirements in consideration, a dedicated clean-room based micro-fabrication of the devices and corresponding electronics to effectively process the signals are presented in this work. The fabricated sensing part can be assembled with wide varieties of passive parts to have different sensing tools as well as grippers. This force sensing tool is based upon the piezoresistive principle, and is experimentally demonstrated with a sensing capability up to 9 mN along the two axes with a resolution of 20 μN. The experimental results validate the measurement error within 1%. This work explains the system design, its working principle, FEM analysis, its fabrication and assembly, followed by the experimental validation of its performance. Moreover, the use of the proposed sensing tool for an instrumented gripper was also discussed and demonstrated with a micrograsping and release task.

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In-situ Versatile Characterization of Carbon NanoTubes using Nanorobotics

Cited by 5 publications

References 15 publications

In-situ SEM Microrobotics for Versatile Force/Deformation Characterization: Application to Third-Body MoS2 Wear Particles

In-situ SEM Microrobotics for Versatile Force/Deformation Characterization: Application to Third-Body MoS2 Wear Particles

Large-Workspace Polyarticulated Micro-Structures Based-On Folded Silica for Tethered Nanorobotics

A Two-Axis Piezoresistive Force Sensing Tool for Microgripping

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