In2O3:Ga and In2O3:P-based one-electrode gas sensors: Comparative study

The effect of the gaseous medium composition on the electrically conductive properties of In2O3-Ga2O3 films obtained by halide vapor phase epitaxy has been studied. In the temperature range of 100-550oC, the In2O3-Ga2O3 films exhibit high sensitivity to H2, NH3 and possess hyphen performance and low base resistance. A qualitative mechanism for the sensitivity of In2O3-Ga2O3 films to gases is proposed. Keywords: In2O3-Ga2O3, halide vapor-phase epitaxy, gas sensitivity.

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“…The same feature of In 2 O 3 −Ga 2 O 3 was noticed in [15] where composites with large contents of Ga 2 O 3 were studied.…”

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confidence: 69%

Gas-sensing properties of In-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=--Ga-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=- alloy films

Николаев

Аlmaev

Kushnarev

et al. 2022

Technical Physics Letters

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“…Recent studies on the gas interaction of nanocrystalline, defect‐rich In 2 O 3 surfaces observe the attachment of the same adsorbate species during ozone, oxygen, or water adsorption, which might be O − . Korotcenkov et al analyzed the influence of grain size and humidity on the sensor response of In 2 O 3 and SnO 2 based conductometric gas sensors. The nanostructured films were deposited by the sol gel method or spray pyrolysis, respectively.…”

Section: Introductionmentioning

confidence: 99%

Towards Understanding the Cross‐Sensitivity of In₂O₃ Based Ozone Sensors: Effects of O₃, O₂ and H₂O Adsorption at In₂O₃(111) Surfaces

Berthold

Katzer

Rombach

et al. 2017

Physica Status Solidi (b)

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The interaction of ozone, oxygen, and water molecules with the (111) surface of indium oxide grown by plasma‐assisted molecular beam epitaxy is investigated. In order to characterize the adsorption and charge transfer mechanisms taking place at ozone‐sensitive In2O3 films and to determine the effect of humidity, we study the chemical and electronic surface properties using photoelectron spectroscopy. Clean surfaces are prepared by vacuum annealing and subsequently exposed to O3, O2, or H2O in serial adsorption sequences. After ozone and oxygen interaction, the same adsorbate species are detected and both molecules reduce the surface electron density, resulting in a decrease of film conductance. However, the quantitative changes of adsorbate coverage, band bending, surface electron concentration, and work function indicate a much higher reactivity of the surface with ozone. In contrast, if the surface is exposed to water, the resulting adsorbates have a different spectroscopic signature and do not significantly alter surface band bending and electron concentration. The effects of ozone/oxygen interaction are weakened if the surface was pre‐exposed to water. These results indicate that water adsorbates occupy surface sites that are consequently not available for ozone interaction and that humidity influences the device sensitivity but not its selectivity toward oxidizing gases.

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“…According to literatures, the solid solubility of Ga in the lattice of In 2 O 3 can be 10 mol% at most, which may also affect the crystal structure of Ga–In 2 O 3 NTs. [ 38,39 ] To confirm it, Figure 2e gives the X‐Ray diffraction (XRD) patterns of the above samples. All diffraction peaks can be indexed to cubic In 2 O 3 (JCPDS no.…”

Section: Resultsmentioning

confidence: 86%

Gas Sensor Array with Pattern Recognition Algorithms for Highly Sensitive and Selective Discrimination of Trimethylamine

Ren

Zhao

Niu

et al. 2022

Advanced Intelligent Systems

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Artificial senses like electronic nose, which ameliorates the problem of poor selectivity from single gas sensor, have elicited keen research interest to monitor hazardous gases. Herein, the doping effects of gallium on In2O3 nanotubes (NTs) are investigated and a four‐component sensor array for the detection of trimethylamine (TMA) is reported. All‐gallium‐doped/alloyed In2O3 (Ga‐In2O3) sensors show improved sensitivity and selectivity to TMA at an operating temperature of 240 °C, with 5 mol% Ga‐doped/alloyed one displaying the highest response in the range of 0.5–100 ppm and the lowest detection limit of 13.83 ppb. Based on the gas‐sensing properties, a four‐component sensor array is fabricated, which shows unique response patterns in variable‐gas backgrounds. Herein, back propagation neural network (BPNN), radial basis function neural network (RBFNN), and principal component analysis‐based linear regression (PCA‐LR) are trained with the gas‐sensing data to discriminate different gases with high accuracy, as well as to predict the concentrations of target gases in different gases and gas mixtures. Furthermore, accuracies of 92.85% and 99.14% can be achieved for the classification of six gases (three single gases and three binary gas mixtures) and for the prediction of TMA concentrations in the presence of different concentrations of TMA and acetone, respectively.

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In2O3:Ga and In2O3:P-based one-electrode gas sensors: Comparative study

Cited by 17 publications

References 43 publications

Gas-sensing properties of In-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=--Ga-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=- alloy films

Gas-sensing properties of In-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=--Ga-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=- alloy films

Towards Understanding the Cross‐Sensitivity of In₂O₃ Based Ozone Sensors: Effects of O₃, O₂ and H₂O Adsorption at In₂O₃(111) Surfaces

Gas Sensor Array with Pattern Recognition Algorithms for Highly Sensitive and Selective Discrimination of Trimethylamine

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In2O3:Ga and In2O3:P-based one-electrode gas sensors: Comparative study

Cited by 17 publications

References 43 publications

Gas-sensing properties of In-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=--Ga-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=- alloy films

Gas-sensing properties of In-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=--Ga-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=- alloy films

Towards Understanding the Cross‐Sensitivity of In2O3 Based Ozone Sensors: Effects of O3, O2 and H2O Adsorption at In2O3(111) Surfaces

Gas Sensor Array with Pattern Recognition Algorithms for Highly Sensitive and Selective Discrimination of Trimethylamine

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Towards Understanding the Cross‐Sensitivity of In₂O₃ Based Ozone Sensors: Effects of O₃, O₂ and H₂O Adsorption at In₂O₃(111) Surfaces