“…The Johnson noise limited detectivity D* of the device is calculated according to Refs. 56 , 57 : where q , λ , h , c , k B , T , J , R and A denote electron charge, laser wavelength, the Planck constant, velocity of light, the Boltzmann constant, operating temperature, dark current density, differential resistance and the effective area of the device, respectively, and it can be extracted from the dark current curve that the R 0 A of the membrane PD is 2.37 × 10 5 Ω cm 2 . As a result, the detector exhibits a room temperature D* of 5.18 × 10 11 cm‧Hz 1/2 /W @1550 nm at − 0.1 V, whose performance is the same level with the rigid InGaAs SWIR photodetectors 58 , 59 .…”