Incorporating geometrical nonlinearities in reduced order models for MEMS gyroscopes

Putnik, Martin; Sniegucki, Mateusz; Cardanobile, Stefano; Kehrberg, Steven; Kuehnel, M.; Nagel, Cristian; Degenfeld-Schonburg, Peter; Mehner, Jan

doi:10.1109/isiss.2017.7935656

Cited by 8 publications

(2 citation statements)

References 12 publications

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“…We will employ shape optimization to shift eigenfrequencies of a single-axis MEMS gyroscope. The same MEMS gyroscope has already been subject of previous publications, which dealt with the modeling of geometric nonlinearities (Putnik et al, 2016(Putnik et al, , 2017b(Putnik et al, ,a, 2018b. In this work, we focus on the linear eigenfrequencies.…”

Section: Modeling Of the Mems Gyroscopementioning

confidence: 99%

Thermoelastic damping in MEMS gyroscopes at high frequencies

2023

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Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g., in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability must be guaranteed under large external loads at high frequencies. The sensitivity of the sensor to such external loads depends strongly on the damping, or rather quality factor, of the high-frequency mechanical modes of the structure. In this paper, we investigate the influence of thermoelastic damping on several high-frequency modes by comparing finite element simulations with measurements of the quality factor in an application-relevant temperature range. We measure the quality factors over different temperatures in vacuum, to extract the relevant thermoelastic material parameters of the polycrystalline MEMS device. Our simulation results show a good agreement with the measured quantities, therefore proving the applicability of our method for predictive purposes in the MEMS design process. Overall, we are able to uniquely identify the thermoelastic effects and show their significance for the damping of the high-frequency modes of an industrial MEMS gyroscope. Our approach is generic and therefore easily applicable to any mechanical structure with many possible applications in nano- and micromechanical systems.

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Section: Modeling Of the Mems Gyroscopementioning

confidence: 99%

Thermoelastic damping in MEMS gyroscopes at high frequencies

2023

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“…Modal truncation has been widely used for MEMS, e.g., for electromechanic RF microswitches with geometrical nonlinearities [11] and fluid structural interactions [12]. Further examples include micromirror arrays [13] and MEMS gyroscopes [14][15][16][17].…”

Section: State Of the Art: Projection-based Linear Model Order Reduct...mentioning

confidence: 99%

Model Order Reduction of Microactuators: Theory and Application

Schütz

Bechtold

2023

Actuators

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This paper provides an overview of techniques of compact modeling via model order reduction (MOR), emphasizing their application to cooperative microactuators. MOR creates highly efficient yet accurate surrogate models, facilitating design studies, optimization, closed-loop control and analyses of interacting components. This is particularly important for microactuators due to the variety of physical effects employed, their short time constants and the many nonlinear effects. Different approaches for linear, parametric and nonlinear dynamical systems are summarized. Three numerical case studies for selected methods complement the paper. The described case studies emerged from the Kick and Catch research project and within a framework of the German Research Foundation’s Priority Program, Cooperative Multistable Multistage Microactuator Systems (KOMMMA).

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Reduced order modelling of the non-linear stiffness in MEMS resonators

Frangi

Gobat

2019

International Journal of Non-Linear Mechanics

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Incorporating geometrical nonlinearities in reduced order models for MEMS gyroscopes

Cited by 8 publications

References 12 publications

Thermoelastic damping in MEMS gyroscopes at high frequencies

Thermoelastic damping in MEMS gyroscopes at high frequencies

Model Order Reduction of Microactuators: Theory and Application

Reduced order modelling of the non-linear stiffness in MEMS resonators

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