1999
DOI: 10.1063/1.124263
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Increase of charge carriers density and reduction of Hall mobilities in oxygen-plasma treated indium–tin–oxide anodes

Abstract: Effects of excess oxygen introduced during sputter deposition on carrier mobility in as-deposited and postannealed indium-tin-oxide filmsWe report investigations of the electronic transport properties carried out by means of the Hall technique for indium-tin-oxide thin films on glass after a variety of surface treatments. We find that oxygen-plasma treatments induce a significant increase in the carrier concentration, and a less significant decrease of mobilities with respect to ''as-received'' or aquaregia tr… Show more

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Cited by 94 publications
(64 citation statements)
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“…Thin-film PL efficiency was measured in air with the aid of an integrating sphere and using a He-Cd laser or UV excitation at 3.82 eV. Light-emitting devices consisted of thin films of PEDOT:PSS spun from water (0.02 g mL À1 ) solutions onto pre-etched, oxygen-plasma-treated ITO substrates [37,38] and annealed at 200 8C for 15 min in nitrogen. Then the emissive polymers were spun from a THF solution (2% by weight) onto the PEDOT:PSS substrates in nitrogen.…”
Section: Methodsmentioning
confidence: 99%
“…Thin-film PL efficiency was measured in air with the aid of an integrating sphere and using a He-Cd laser or UV excitation at 3.82 eV. Light-emitting devices consisted of thin films of PEDOT:PSS spun from water (0.02 g mL À1 ) solutions onto pre-etched, oxygen-plasma-treated ITO substrates [37,38] and annealed at 200 8C for 15 min in nitrogen. Then the emissive polymers were spun from a THF solution (2% by weight) onto the PEDOT:PSS substrates in nitrogen.…”
Section: Methodsmentioning
confidence: 99%
“…By treating ITO anodes with oxygen plasma the surface energy can be increased, which not only raises the ITO work function, but also leads to greater adhesion with subsequently deposited polymer layers. [26,27] This leads to reduced interfacial stress and a more-efficient electrical contact, with concomitant improvement in charge-carrier injection and OLED performance. Such effects would also be highly desirable in the case of VPP PEDOT anodes.…”
mentioning
confidence: 97%
“…On other hand, the sheet resistance of ITO anodes treated by the oxygen plasma and the SCCO 2 /H 2 O 2 were 4.5 X/square and 4.5-4.8 X/square, as compared with 5 X/square of the as-cleaned ITO anode. The oxygen plasma and SCCO 2 /H 2 O 2 treatments can both improve the sheet resistance of the ITO samples through removing surface contaminants and increasing oxygen vacancies on the ITO surfaces [19]. Figure 3 shows the deconvoluted XPS O 1 s spectra of the as-cleaned ITO surface and the ITO surfaces treated with the oxygen plasma and the SCCO 2 /H 2 O 2 fluid at 4000 psi for 15 min.…”
Section: Methodsmentioning
confidence: 98%