ZnO doped with transition metals (Co, Fe, or Ni) that
have non-compensated
electron spins attracts particular interest as it can induce various
magnetic phenomena and behaviors. The advanced atomic layer deposition
(ALD) technique makes it possible to obtain very thin layers of doped
ZnO with controllable thicknesses and compositions that are compatible
with the main microelectronic technologies, which further boosts the
interest. The present study provides an extended analysis of the magneto-optical
MO Kerr effect and the dielectric properties of (Co, Fe, or Ni)-doped
ZnO films prepared by ALD. The structural, magneto-optical, and dielectric
properties were considered in relation to the technological details
of the ALD process and the corresponding dopant effects. All doped
samples show a strong MO Kerr behavior with a substantial magnetization
response and very high values of the Kerr polarization angle, especially
in the case of ZnO/Fe. In addition, the results give evidence that
Fe-doped ZnO also demonstrates a ferroelectric behavior. In this context,
the observed rich and versatile physical nature and functionality
open up new prospects for the application of these nanostructured
materials in advanced electronic, spintronic, and optical devices.