Independent tuning of linear and nonlinear stiffness coefficients [actuators]

Adams, Scott G.; Bertsch, F.M.; Shaw, K.A.; MacDonald, N.C.

doi:10.1109/84.679344

Cited by 85 publications

(54 citation statements)

References 7 publications

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“…Such advances now make it feasible to envisage new classes of signal processors, sensors, and even computational systems, with functionality derived primarily from their mechanical, rather than their electrical degrees of freedom. However, the design of such mechanical systems may be quite challenging due to nonlinear effects that may strongly affect the dynamics, as was demonstrated recently with individual MEMS resonators (see, for example, [2]). Moreover, integrating individual mechanical elements to realize large-scale systems requires developing methods to couple individual mechanical elements to facilitate new types of coordinated, collective and engineered system response.…”

Section: T He Field Of Microelectromechanical Systems (Mems)mentioning

confidence: 99%

Electrically tunable collective response in a coupled micromechanical array

Buks

Roukes

2002

J. Microelectromech. Syst.

161

194

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Abstract-We employ optical diffraction to study the mechanical properties of a grating array of suspended doubly clamped beams made of Au. The device allows application of electrostatic coupling between the beams that gives rise to formation of a band of normal modes of vibration (phonons). We parametrically excite these collective modes and study the response by measuring the diffraction signal. The results indicate that nonlinear effects strongly affect the dynamics of the system. Further optimization will allow employing similar systems for real-time mechanical spectrum analysis of electrical waveforms.[756]

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Section: T He Field Of Microelectromechanical Systems (Mems)mentioning

confidence: 99%

Electrically tunable collective response in a coupled micromechanical array

Buks

Roukes

2002

J. Microelectromech. Syst.

161

194

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“…The idea of tuning the nonlinearities in microelectromechanical devices has been investigated in the literature [34][35][36]. More recently, nonlinear tuning has been used to increase the dynamic range of electrostatically driven resonators [37][38][39] (but see also [40] for an example of relying on modal coupling).…”

Section: Introductionmentioning

confidence: 99%

Nonlinear tuning of microresonators for dynamic range enhancement

2015

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This paper investigates the development of a novel framework and its implementation for the nonlinear tuning of nano/microresonators. Using geometrically exact mechanical formulations, a nonlinear model is obtained that governs the transverse and longitudinal dynamics of multilayer microbeams, and also takes into account rotary inertia effects. The partial differential equations of motion are discretized, according to the Galerkin method, after being reformulated into a mixed form. A zeroth-order shift as well as a hardening effect are observed in the frequency response of the beam. These results are confirmed by a higher order perturbation analysis using the method of multiple scales. An inverse problem is then proposed for the continuation of the critical amplitude at which the transition to nonlinear response characteristics occurs. Pathfollowing techniques are employed to explore the dependence on the system parameters, as well as on the geometry of bilayer microbeams, of the magnitude of the dynamic range in nano/microresonators.

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“…Previous efforts to tune the deviated resonant frequency have used the electrostatic spring effect, which is an electrostatic stiffness dependency on the applied voltage [4,5], and the geometry of the capacitors [6][7][8][9][10][11]. A thermal method that increases the temperature of the device to change the mechanical characteristics of the device to tune the resonant frequency was also introduced [12,13].…”

Section: Introductionmentioning

confidence: 99%

Resonant-frequency tuning of angular vertical comb-driven microscanner

Eun

Kim

Liu

2014

Micro and Nano Syst Lett

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The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A tuning electr ode is fabricated to be electrically separated from the actuation electrode to tune the resonant frequency by adjusting the applied direct-current voltage bias. The experimentally obtained maximum resonant-frequency shift was 3.2% when the resonant frequency of 3167 Hz is reduced to 3066 Hz when a tuning voltage of 30 V was applied while maintaining the actuation voltage. The method enables facile frequency tuning without any permanent geometrical modification to the microscanner.

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Independent tuning of linear and nonlinear stiffness coefficients [actuators]

Cited by 85 publications

References 7 publications

Electrically tunable collective response in a coupled micromechanical array

Electrically tunable collective response in a coupled micromechanical array

Nonlinear tuning of microresonators for dynamic range enhancement

Resonant-frequency tuning of angular vertical comb-driven microscanner

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