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A new design of flexible energy harvester to utilize piezoelectric and electrostatic energy conversion mechanisms simultaneously from a single mechanical energy source is proposed. This non-resonant type harvester enables low-frequency mechanical inputs to be converted to electricity, and the polymeric structures make the harvester mechanically flexible, allowing it to be applied to non-planar surfaces. The fabricated harvester generated peak- and average power densities of 159 and 1.79 μW cm−2 respectively by piezoelectric conversion, and 52.9 μW cm−2 and 1.59 nW cm−2 respectively by electrostatic conversion from an input force of 1.2 N at 3 Hz. Considering its flexibility and ability to harvest mechanical inputs at frequencies below 3 Hz, low-frequency human movements could be a potential energy source for the proposed hybrid harvester to exploit.

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CNT arrays are used as removable dry adhesives for high‐temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self‐assembled CNTs is utilized to strain the microstructures in high‐temperature environments. Arrays of analog micromirrors are successfully fabricated by silicon processing. The proposed method significantly simplifies the fabrication process.